本发明公开了一种采用金属源化学气相沉积技术制备掺杂氧化锌的方法，包括：步骤1：在金属源化学气相沉积(MVPE)的生长气路上增加一路还原性气路；步骤2：将掺杂金属和金属锌分别放入金属舟，并加入少量的去离子水或过氧化氢；步骤3：将清洗干净的衬底放入衬底托上；步骤4：生长之前对金属舟进行氧化处理；步骤5：生长掺杂氧化锌，在生长过程中一直开启还原性气路。本发明具有可控掺杂，且具有生长速度快 ...
王晓峰, 段垚, 刘祯, 曾一平
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