一种基于谐振原理工作的MEMS滤波器模块，包括：一差分信号产生电路；一MEMS滤波器芯片的第一输入端a与差分信号产生电路的输出端连接；一电压转换电路的输出端与该MEMS滤波器芯片的第二输入端b连接；一互阻放大电路的输入端与MEMS滤波器芯片的输出端b连接；一频率漂移检测电路的输入端与互阻放大电路的输出端连接；一频率稳定电路的输入端与频率漂移检测电路的输出端连接，该频率稳定电路输出端与MEMS滤波器芯片的第三输入端c连接，当互阻放大电路的输出信号的频率发生漂移时，提供相应的直流电压信号给滤波器芯片 ...
杨富华, 宁瑾, 韩国威, 李永梅
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