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一种利用氧化锌提高LED光提取效率的方法，包括以下步骤：步骤1：取一GaN基发光二极管外延片；步骤2：在GaN基发光二极管外延片的出光面上生长一层ZnO单晶薄膜；步骤3：利用湿法化学腐蚀的方法，腐蚀ZnO单晶薄膜的表面，使ZnO单晶薄膜的表面在位错处出现腐蚀坑；步骤4：光刻生长有ZnO单晶薄膜的GaN基发光二极管外延片，在GaN基LED外延片上形成重复的LED基本结构单元，刻蚀LED基本结构单元的一侧形成一台面，制作出LED的基本芯片结构；步骤5：在LED的基本芯片结构的台面上制作n电极 ...
王晓峰, 段垚, 刘祯, 曾一平
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