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大规模防止MEMS器件结构层材料被电化学腐蚀的方法

本发明公开了一种大规模防止MEMS器件结构层材料被电化学腐蚀的方法，该方法是利用光刻胶这种高分子材料来阻断器件的结构层材料与贵金属在HF基腐蚀液中形成原电池的电学通路，具体包括：在SiO2层的湿法腐蚀之前，在器件表面旋涂一层光刻胶，使其完全覆盖贵金属层表面。利用本发明，使光刻胶形成具有较低孔密度的致密体型高分子结构，阻断贵金属与结构层材料在HF基腐蚀液中的原电池电路，从而有效避免了结构层材料被氧化腐蚀。该方法仅在标准MEMS器件加工工艺中增加一步标准光刻步骤 ...
解婧, 杨富华, 刘云飞, 杨晋玲
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[The Oral Microecological Theory of Dental Caries]. [PDF]

Sichuan Da Xue Xue Bao Yi Xue Ban
Zhou X.
europepmc   +1 more source

Research status and prospects of biodegradable magnesium-based metal guided bone regeneration membranes. [PDF]

Hua Xi Kou Qiang Yi Xue Za Zhi
Chen L, Han J, Guo C.
europepmc   +1 more source

[Molecular mechanism of magnesium alloy promoting macrophage M2 polarization through modulation of PI3K/AKT signaling pathway for tendon-bone healing in rotator cuff injury repair]. [PDF]

Zhongguo Xiu Fu Chong Jian Wai Ke Za Zhi
Sheng X, Zhang W, Song S, Zhang F, Zhang B, Tian X, Xiong W, Zhu Y, Xie Y, Li Z, Tan L, Zhang Q, Wang Y.   +12 more
europepmc   +1 more source

[Ion chromatography-pulsed amperometry method for determination of trace hydrogen sulfide in air]. [PDF]

Se Pu
Gao XJ, Ni T, Shen R, Shi CO.
europepmc   +1 more source

[Applications and challenges of ultra-high molecular weight polyethylene fibers in minimally invasive medical devices]. [PDF]

Sheng Wu Yi Xue Gong Cheng Xue Za Zhi
Shi S, Shi Y, Zhu J, Shi X, Cui N, Cui H, Zhang Z, Hou Z, Wu W, Wu P.   +9 more
europepmc   +1 more source

[Toxicity of lunar dust simulant exposure via the digestive system: Microbiota dysbiosis and multi-organ injury]. [PDF]

Zhong Nan Da Xue Xue Bao Yi Xue Ban
Chen Y, Liu Y, He S, Gong X, Cheng Q, Chen Y, Hu X, Wang Z, Xie H.   +8 more
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[Progress in biocompatibility and surface modification of nickel titanium shape memory alloys]. [PDF]

Zhongguo Xiu Fu Chong Jian Wai Ke Za Zhi, 2018
Bai J, Xu Y, He X, Li C, Zhu M.
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[Applications and prospects of graphene and its derivatives in bone repair]. [PDF]

Zhongguo Xiu Fu Chong Jian Wai Ke Za Zhi
Du Z, Ma Y, Wang C, Zhang R, Li X.
europepmc   +1 more source

[Biocompatibility of 3D printed biodegradable WE43 magnesium alloy scaffolds and treatment of bone defects]. [PDF]

Beijing Da Xue Xue Bao Yi Xue Ban
Min S, Tian Y.
europepmc   +1 more source