本发明涉及一种离焦量测试系统及测试方法,该离焦量测试系统包括光源、小口径缩束系统、大口径缩束系统、自准元件以及波前测试装置;小口径缩束系统包括分 光镜、准直物镜以及准直目镜;分光镜设置在光源的出射光路上;所述准直物镜设置在经分光镜透射后的透射光路上;大口径缩束系统以及自准元件依次设置在经分 光镜与准直物镜透射后的透射光路上;透射光依次经过大口径缩束系统以及自准元件后形成自准光;自准光依次经过大口径缩束系统、准直物镜以及分光镜后并由分 光镜反射至准直目镜;波前测试装置设置在经准直目镜透射后的透射光路上 ...
陈永权 +6 more
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