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一种低偏置电压下具有增益的硅光电探测器及其制备方法

 本发明公开了一种低偏置电压下具有增益的硅光电探测器,包括：Si衬底；在该Si衬底第一表面依序形成的硫系元素过饱和替位掺杂的n+型Si层和第一电极,该硫系元素过饱和替位掺杂的n+型Si层与Si衬底构成第一半导体结；以及在该Si衬底第二表面依序形成的第二半导体结和第二电极。本发明同时公开了一种制备低偏置电压下具有增益的硅光电探测器的方法。利用本发明,由于将激光掺杂改变为离子注入加激光辐照,在重掺杂区域内使杂质尽可能多地形成了过饱和替位掺杂,进而可以保持Si表面整洁,适合器件芯片的微电子工艺加工 ...
韩培德
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[Design and implementation of the internet of medical things data platform based on cloud-edge-end architecture]. [PDF]

Sheng Wu Yi Xue Gong Cheng Xue Za Zhi
Liang H, Sun J, Ren H, Lu X, Liu T, Fan Y, Chao Y, Cao D, He K, Zhang Z, Lyu J.   +10 more
europepmc   +1 more source

[Researches and clinical translation of smart dressings]. [PDF]

Zhonghua Shao Shang Yu Chuang Mian Xiu Fu Za Zhi
Lyu GZ, Zhao P.
europepmc   +1 more source

[Progress in electric field assisted molecular imprinting technology]. [PDF]

Se Pu
Wu JY, Huang XJ.
europepmc   +1 more source

[Preparation and <i>in vitro</i> biological performance evaluation of tannic acid-Brushite <i>in situ</i> composite bone cement material]. [PDF]

Zhongguo Xiu Fu Chong Jian Wai Ke Za Zhi
Zeng C, Tang J, Li T, Gao W.
europepmc   +1 more source

[A Transformer-based multimodal model for predicting hospital-acquired infections using imaging and clinical laboratory data]. [PDF]

Nan Fang Yi Ke Da Xue Xue Bao
Zhang M, Wu D, Lin J, Lü Y, Zhou L, Zhen X, Zhou H, Qin G.   +7 more
europepmc   +1 more source

[Effects of spinal cord stimulation implantation on heart rate variability in patients with postherpetic neuralgia]. [PDF]

Zhong Nan Da Xue Xue Bao Yi Xue Ban
Zhang X, Zhou Y, Huang D, Zhou H, Yan X.
europepmc   +1 more source

[Development of an OCTA-based risk prediction model for retinopathy in patients with obstructive sleep apnea and hypertension]. [PDF]

Lin Chuang Er Bi Yan Hou Tou Jing Wai Ke Za Zhi
DU X, Dong J, Li Y.
europepmc   +1 more source

[Petroleum ether fraction of <i>Myrica nana</i> roots relieves spasmodic abdominal pain in mice by inhibiting intestinal smooth muscle spasm]. [PDF]

Nan Fang Yi Ke Da Xue Xue Bao
Yang S, Chen W, Chen X, Tian K, Xiong Y, Sun J, Huang L, Huang X, Wang Z.   +8 more
europepmc   +1 more source

[Impact of surgeon's dominant hand-side consistency with surgical approach on operational efficiency of unilateral biportal endoscopic lumbar discectomy: a prospective cohort study]. [PDF]

Zhongguo Xiu Fu Chong Jian Wai Ke Za Zhi
Li W, Gao M, Zhang L, Yu Q, Chen X.
europepmc   +1 more source