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电感耦合等离子体辐射源温度径向分布的光学测量

, 1982
(一)引言电感耦合等离子体辐射源是七十年代发展起来的一种新型辐射源,因为它具有温度高、稳定、污染小等优点,在冶金工业,半导体工业以及分析化学领域都得到了广泛的应用。掌握等离子体的温度分布,或进而掌握粒子分布状态,可以为研究等离子辐射源中各种反应过程的机理提供重要参数。我们用3.5仟瓦的氩等离子体作光源,初步摸索了光谱法测量电感耦合等离子体温度径向分布的方法。1961年Reed首次用单谱线强度法及数值法的Abel变换,测量了氩ICP辐射源的温度径向分布。由于氩的跃迁几率A,统计权重g ...
张力, 刘克玲, 施承蕾
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Sheng Wu Yi Xue Gong Cheng Xue Za Zhi
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