一种垂直相变存储器的制备方法,包括如下步骤:步骤1:在衬底上生长第一金属层作为底部电极;步骤2:在第一金属层上淀积第一绝缘材料层;步骤3:采用微纳加工技术将该第一绝缘材料层制作成纳米尺寸的绝缘柱体;步骤4:在第一金属层上和绝缘柱体的表面淀积第二金属层作为加热电极;步骤5:在第二金属层上淀积第二绝缘材料层;步骤6:用化学机械抛光的方法抛光表面,同时切断绝缘柱体顶部的第二金属层的连接,形成环形的加热电极;步骤7:最后淀积相变材料和顶部电极 ...
马慧莉 +5 more
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