一种利用光子束超衍射技术制备半导体T型栅电极的方法,包括如下步骤:步骤1:在待制备T型栅的样品上面淀积介质钝化层;步骤2:在介质钝化层上涂覆抗蚀剂;步骤3:利用光子束超衍射纳米加工技术,在抗蚀剂上曝光,显影,定影,形成栅足图形;步骤4:用RIE刻蚀技术,将栅足图形下面的介质钝化层刻蚀,形成沟槽;步骤5:将残余的抗蚀剂洗去,在介质钝化层上涂覆光刻胶;步骤6:利用光子束超衍射纳米加工技术,在光刻胶上曝光,显影,定影,形成栅头图形;步骤7:在光刻胶上蒸发栅极金属;步骤8:去除光刻胶 ...
颜伟, 杨富华, 韩伟华, 杜彦东
core
本人利用"模板浇铸法"成功制备了大小均一且表面多孔的明胶微凝胶,在微凝胶的制备的过程中利用模板粒子-碳酸钙比表面积大、多孔的特性,可将多种纳米颗粒(例如金纳米颗粒、量子点、铂纳米颗粒以及磁性纳米颗粒等)以可控的方式吸附到模板粒子中。"浇筑"明胶、交联、温和条件下除去模板粒子后,即可得到负载有不同纳米颗粒的明胶微凝胶。研究发现此方法对纳米颗粒的表面性质没有严格的要求,都可以有效地将不同的纳米颗粒负载到明胶微凝胶中,赋予明胶微凝胶多功能的性质 ...
白硕, 王安河, 董倩倩, 崔凌云
core
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