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3D shape measurements of transparent micro objects
The Proceedings of Mechanical Engineering Congress, Japan, 2016Teppei ONUKI +5 more
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3D Shape Measurements of Patterned Silicon Wafers
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)Jan O. Gaudestad +5 more
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3D-shape measuring system using projected fringes
16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993openaire +1 more source