Review on modeling and application of chemical mechanical polishing
Nanotechnology Reviews, 2020 With the development of integrated circuit technology, especially after entering the sub-micron process, the reduction of critical dimensions and the realization of high-density devices, the flatness between integrated circuit material layers is becoming
Zhao Gaoyang +6 more
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Review on the Research of Polishing Technologies for Gear Tooth Profiles
Jixie chuandong, 2023 Gears are the most widely used transmission parts in the modern mechanical transmission system. The precision and surface quality of gear tooth profiles have great influence on the precision, smoothness, reliability and noise of gear transmission.
Chen Yangjian +4 more
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Journal of Machine EngineeringIn the pursuit of advancing the surface machining efficiency of Ti-6Al-4V material through magnetic polishing, this study introduces a new approach methodology.
Nguyen Duy Trinh +7 more
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Method for one-to-one polishing of silicon nitride and silicon oxide [PDF]
, 2009 The present invention provides a method of removing silicon nitride at about the same removal rate as silicon dioxide by CMP. The method utilizes a polishing slurry that includes colloidal silica abrasive particles dispersed in water and additives that ...
Babu, Suryadevara V., Natarajan, Anita
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The fabrication of beryllium. Volume III - Metal removal techniques [PDF]
Metal removal techniques for beryllium in spacecraft structure ...
Ingels, S. E., Williams, R. F.
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Review of Ultrasonic Vibration-assisted Abrasive Flow Polishing Technology [PDF]
Journal of Mechanical Engineering, 2021 openaire +1 more source
The friction and wear of metals and binary alloys in contact with an abrasive grit of single-crystal silicon carbide [PDF]
Sliding friction experiments were conducted with various metals and iron-base binary alloys (alloying elements Ti, Cr, Mn, Ni, Rh and W) in contact with single crystal silicon carbide riders.
Buckley, D. H., Miyoshi, K.
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Frictional characteristics of steel plates during abrasive particle flow: A comparison of in situ measurements made on a linear abrasive wear tester with those on a Jenike shear tester Jenike shear tester [PDF]
, 2004 Friction measurements were made on two testers: the Jenike shear tester and a linear abrasion wear tester (LAWT). Wall friction values were obtained for a range of steels and surface finishes, typical of the plates used for the manufacture of hoppers and
Bingley, Mark +2 more
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Experimental Analysis of Spiral Finishing Process on EDM Drilled Hole in Titanium
Journal of EngineeringIt is quite evident that some of the experimental research works have been carried out by researchers in the area of spiral polishing using abrasive for surface finishing improvement but most of the experiment has been employed on Steel or Alloy Steel as
Md Farid Hossain +6 more
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Friction and wear with a single-crystal abrasive grit of silicon carbide in contact with iron base binary alloys in oil: Effects of alloying element and its content [PDF]
Sliding friction experiments were conducted with various iron-base binary alloys (alloying elements were Ti, Cr, Mn, Ni, Rh, and W) in contact with a rider of 0.025-millimeter-radius, single-crystal silicon carbide in mineral oil.
Buckley, D. H., Miyoshi, K.
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