Results 231 to 240 of about 1,355,785 (283)
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Composite sensor and acceleration sensor
The Journal of the Acoustical Society of America, 2010In an acceleration sensor, a first vibrator is arranged on a surface of a substrate such that the vibrator can vibrate in an X-axis direction. An angular-velocity-detecting vibrator is arranged inside the first vibrator such that the vibrator can be displaced in a Y-axis direction.
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The Journal of the Acoustical Society of America, 1993
Kazuo Yoshimura +2 more
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Kazuo Yoshimura +2 more
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Semiconductor acceleration sensor
The Journal of the Acoustical Society of America, 1998A semiconductor acceleration sensor including a trench provided in a main surface of a semiconductor substrate, the trench having a first inner wall, a second inner wall opposite to the first inner wall, and a third inner wall joining the first and second inner walls.
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Multicomponent acceleration sensor
The Journal of the Acoustical Society of America, 1995A multicomponent acceleration sensor in which the inertial force of a seismic mass effects a variation in an electromagnetic quantity of a plurality of individual transducers. During acceleration, the seismic mass acts in each individual transducer a magnetoelastic measuring layer, the permeability μr of which influences the inductance of a sensor coil.
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The Journal of the Acoustical Society of America, 1990
YAMADA TOSHITAKA +6 more
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YAMADA TOSHITAKA +6 more
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The Journal of the Acoustical Society of America, 1992
Shunichi Wada, Masayuke Yano
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Shunichi Wada, Masayuke Yano
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Investigation of FBG Linear/Angular Acceleration Sensor for Novel Type Inertial Measurement
IEEE Transactions on Industrial Electronics, 2023Jinseok Kim, Dae-Eun Kim, Minsu Jang
exaly