Results 31 to 40 of about 142,317 (301)
Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films
Proceedings, 2017 When targeting the integration of atomic force microscopes (AFM) into vacuum environments (e.g., scanning electron microscopes), a tunable Q-factor of the resonating AFM cantilever is a key feature to enable high speed measurements with high local ...
Martin Fischeneder +3 more
doaj +1 more source
Novel MEMS Sensor for Detecting Magnetic Particles in Liquids
Proceedings, 2018 We present a novel MEMS sensor for the detection of magnetic particles in liquids, which consists of a microcantilever excited piezoelectrically in resonance and having an integrated planar coil on its free end.
Florian Patocka +3 more
doaj +1 more source
Crone control of a nonlinear hydraulic actuator [PDF]
, 2002 The CRONE control (fractional robust control) of a hydraulic actuator whose dynamic model is nonlinear is presented. An input-output linearization under diffeomorphism and feedback is first achieved for the nominal plant.
Oustaloup, Alain +3 more
core +1 more source
Porous Silicon Carbide for MEMS
Proceedings, 2017 Metal assisted photochemical etching (MAPCE) of 4H Silicon Carbide (SiC) was utilized to generate locally defined porous areas on single crystalline substrates.
Markus Leitgeb +4 more
doaj +1 more source
Acknowledgment to Reviewers of Journal of Sensor and Actuator Networks in 2020
, 2021 Peer review is the driving force of journal development, and reviewers are gatekeepers who ensure that Journal of Sensor and Actuator Networks maintains its standards for the high quality of its published papers [...
Journal of Sensor and Actuator Networks Editorial Office Journal of Sensor and Actuator Networks Editorial Office
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Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films
Sensors, 2018 In atomic force microscopes (AFM) a resonantly excited, micro-machined cantilever with a tip is used for sensing surface-related properties. When targeting the integration of AFMs into vacuum environments (e.g., for enhancing the performance of scanning ...
Martin Fischeneder +3 more
doaj +1 more source
CO Detection Investigation at High Temperature by SiC MISFET Metal/Oxide Gas Sensors
Proceedings, 2021 In order to investigate the necessary device improvements for high-temperature CO sensing with SiC metal insulator semiconductor field effect transistor (MISFET)-based chemical gas sensors, devices employing, as the gas-sensitive gate contact, a film of ...
Lida Khajavizadeh +2 more
doaj +1 more source
Proceedings, 2017 This paper investigates the performance of surface acoustic wave (SAW) devices as low power MEMS temperature sensors using reactive sputter deposited aluminum nitride (AlN) and scandium doped aluminum nitride (AlScN) as piezoelectric layers on sapphire ...
Manuel Gillinger +3 more
doaj +1 more source
Active vibration control for a Free Piston Stirling Engine generator using a voice coil actuator [PDF]
, 2015 This work presents the study of active vibration control for a FPSE/ LA engine to ensure a reliable engine operation within a broader range of operation frequencies [50 ± 3 Hz] complying with new regulations.
Torres Perez, Angel; id_orcid +6 more
core +1 more source
Dielectric elastomer stack actuator modules with integrated electronics and encapsulation
, 2023 199204Integrated electromechanical actuator modules have been developed which consist of dielectric elastomer actuators (DEA), high voltage electronics to control the actuators and encapsulations to prevent the actuators from contact with surrounding ...
Giousiouf, Metin +6 more
core +1 more source