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Atomic Layer Deposition

2017
Over the course of this semester understanding of the theory and application of Atomic Layer Deposition [ALD] was pursued, all in preparation for further research focusing on the charge carrier type, density, and mobility in ultrathin film ZnO. At the beginning of the semester a wide array of scientific articles was read in order to build up a basic ...
Pannock, Daniel, Banerjee, Parag
openaire   +2 more sources

Atomic Layer Deposition for Semiconductors

2014
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
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Electroless Deposition of Silver Layer on Atomic-Layer-Deposited TiN

Applied Mechanics and Materials, 2012
A laminate of silver/atomic layer deposition TiN/Si was prepared to research the thermal reliability. The atomic layer TiN was subjected into different kinds of plasma to modify its surface chemistry. The surface tension of the TiN/Si surface was found to be reduced by O2 plasma bombardment.
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Emerging Dual‐Atomic‐Site Catalysts for Efficient Energy Catalysis

Advanced Materials, 2021
Weiyu Zhang, Yuguang Chao, Fan Lv
exaly  

Atomic‐Level Charge Separation Strategies in Semiconductor‐Based Photocatalysts

Advanced Materials, 2021
Tie-Rui Zhang   +2 more
exaly  

Electrochemical ion insertion from the atomic to the device scale

Nature Reviews Materials, 2021
Aditya Sood   +2 more
exaly  

Entanglement on an optical atomic-clock transition

Nature, 2020
Edwin Pedrozo-Peñafiel   +2 more
exaly  

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