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Principle of Auger Electron Spectroscopy
2021The excitation process of an Auger electron is explained in this chapter. An Auger transition, labeled as KL2L3, occurs through a mechanism involving three electrons in 1s1/2, 2p1/2, and 2p3/2 energy levels of an analyte element, which can be utilized for the elemental analysis because the Auger electron emitted from the 2p3/2 orbital has a particular ...
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2018
As each element carries unique values of core-level binding energies, EC, this has enabled the development of numerous elemental composition analysis methods based on core electron excitation.
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As each element carries unique values of core-level binding energies, EC, this has enabled the development of numerous elemental composition analysis methods based on core electron excitation.
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Quantitative Auger Electron Spectroscopy
1983Publisher Summary This chapter reviews Auger electron emission from a target subjected to electron bombardment. It is noted that the chapter considers the Auger electron spectroscopy (AES) without reference to the excitation mode throughout, in order to denote the analysis technique developed for electron-induced Auger electron emission.
M. Cailler, J.P. Ganachaud, D. Roptin
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1999
Auger Electron Spectroscopy (AES)1, 2, 3, 4, 5, 6 is an essential tool for analyzing failed IC’s where surface characterization is required. It provides elemental identification and, in some cases, chemical information about substances in highly localized areas in very near-surface regions of materials, thin films, or film interfaces.
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Auger Electron Spectroscopy (AES)1, 2, 3, 4, 5, 6 is an essential tool for analyzing failed IC’s where surface characterization is required. It provides elemental identification and, in some cases, chemical information about substances in highly localized areas in very near-surface regions of materials, thin films, or film interfaces.
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Spectrochimica Acta Part A: Molecular Spectroscopy, 1985
Michael Thomsom +4 more
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Michael Thomsom +4 more
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14th International Reliability Physics Symposium, 1976
J.M. Morabito, Frank Grunthaner
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J.M. Morabito, Frank Grunthaner
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