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Inorganic block copolymer lithography [PDF]

open access: yesPolymer, 2013
Block copolymer lithography, a process where block copolymer self-assembly is integrated with conventional lithographic patterning, is emerging as a promising technology for addressing the future needs of the semiconductor industry.
Ian Manners, Adam Nunns, Jessica Gwyther
exaly   +2 more sources
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