Lightweight Hybrid Wafer Defect Pattern Network Based on Feedforward Efficient Attention
ABSTRACT With the increase of semiconductor integration density, in order to cope with the increase of wafer defect complexity and types, especially the low recognition accuracy of overlapping mixed defects and unknown wafer defects, this study proposes a lightweight model for wafer defect detection called LightWMNet.
Zhiqiang Hu, Yiquan Wu
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