Results 141 to 150 of about 9,421 (195)

Contamination insensitive differential capacitive pressure sensors

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), 2000
In this paper, a contamination-insensitive differential capacitive pressure sensor with a sealed gap is presented. This device is made of three polysilicon layers including a stationary middle plate and the top and bottom plates that are rigidly coupled together by a series of posts hence deflecting in tandem by a change in differential or gauge ...
null Chuan Che Wang, B.P. Gogoi, D.J. Monk, C.H. Mastrangelo   +3 more
openaire   +1 more source

Liquid Level Measurement through Capacitive Pressure Sensor

2020 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 2020
Property of fluid and material compatibility limit the level sensor’s fabrication, dynamic range and accuracy. Piezoresistive pressure sensing elements with media compatible diaphragm are limited in low pressure dynamic. In contrast, capacitive pressure sensing elements provide better solution in terms of dynamic range.
Esmaili P., Cavedo F., Pesatori A., Norgia M.   +3 more
openaire   +1 more source

Single-Wafer Pressure Capacitive Sensor

2007 IEEE International Symposium on Circuits and Systems (ISCAS), 2007
A novel manufacturing process for pressure sensor without the need of wafer bonding is presented. Its main advantages are a simple fabrication process and an efficient integr ability with other devices. The sensor is composed of a polysilicon membrane that deflects due to the pressure difference applied over it.
R.G. Bolea, A. Luque, J.M. Quero
openaire   +1 more source

Capacitive pressure sensor for MEMS

SPIE Proceedings, 2003
Pressure sensors have widespread applications in medicine and automotive industry. Specific designs and mounting arrangements vary considerably, ranging from small, sensitive catheter-tip transducers used within the heart to the bigger, rugged devices needed for industrial process control.
Amita Gupta, Amir Ahmad, Ranvir Singh
openaire   +1 more source

Catheter‐tip capacitive pressure sensor

Electronics and Communications in Japan (Part II: Electronics), 1990
AbstractAs a pressure sensor to be used at the tip of a catheter, a capacitive relative pressure sensor was fabricated. This paper describes the fabrication process and the characteristics of this pressure sensor.The size of the sensor fabricated is 0.7 × 3.5 × 0.8 mm3 and the spacing between the capacitor electrodes is either 1.0 μm or 1.5 μm.
Masayoshi Esashi, Shuichi Shoji, Yosinori Matsumoto, Kazuyoshi Furuta   +3 more
openaire   +1 more source

Touch mode capacitive pressure sensors

Sensors and Actuators A: Physical, 1999
Touch mode capacitive pressure sensors offer better performance in industrial applications than other devices. In touch mode operation, the diaphragm of the capacitive pressure sensor touches the substrate structure in operation range. The advantages of this mode of operation are near-linear output characteristics, large over-range pressure and robust ...
Wen H. Ko, Qiang Wang
openaire   +1 more source

Miniature polymer capacitive pressure sensor

Proceedings 2007 IEEE SoutheastCon, 2007
This paper describes the development of a miniaturized pressure sensing device made of polymer materials. An all-polymer design imparts a high degree of physical flexibility, if required, and makes the device very lightweight. The use of moldable polymers for the device components allows the rapid prototyping of this device, cutting down production ...
Naga Korivi, Li Jiang
openaire   +1 more source

Capacitive Silicon Differential Pressure Sensor

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95, 2005
A capacitive differential pressure sensor based on silicon bulk micromachining is presented. This sensor, which is part of a flow metering system, transforms the differential pressure delivered by a fluidic oscillator into capacitance variations. These variations are then converted by an ASIC into a digital output signal.
J. Hermann, C. Bourgeois, F. Porret, B. Kloeck   +3 more
openaire   +1 more source

Soft Capacitive Pressure Sensors: Trends, Challenges, and Perspectives

ACS Nano, 2022
Soft pressure sensors are critical components of e-skins, which are playing an increasingly significant role in two burgeoning fields: soft robotics and bioelectronics. Capacitive pressure sensors (CPS) are popular given their mechanical flexibility, high sensitivity, and signal stability.
Kyoung-Ho Ha, Heeyong Huh, Zhengjie Li, Nanshu Lu   +3 more
openaire   +2 more sources

A Thin-Film Capacitance Pressure Sensor

Measurement Techniques, 2015
Results of theoretical and experimental investigations of thin-film capacitance sensors for measurements of static and pulsation pressures are presented. The sensor membrane is produced from Fe–Ni alloy.
A. A. Kazaryan, E. V. Strel’tsov
openaire   +1 more source