Results 151 to 160 of about 9,421 (195)
Some of the next articles are maybe not open access.
High-precision capacitative absolute pressure sensor
Sensors and Actuators, 1989Abstract An advanced low-cost capacitive silicon absolute pressure sensor is described and experimental results are presented. The combination of a capacitive pressure sensor chip and a standard CMOS chip with an oscillator circuit has shown a resolution better than 10−4. The pressure sensor chip proves to be very stable, with a hysteresis and a long-
A. Jornod, F. Rudolf
openaire +1 more source
A flexible highly sensitive capacitive pressure sensor
Sensors and Actuators A: Physical, 2021Abstract Flexible pressure sensor has been increasingly recognized over the past several decades, but there is still a challenge to fabricate it with a superb sensitivity and large sensing range. Herein, a highly flexible, sensitive and capacitive pressure sensor based on a porous ionic membrane is developed.
Xiaofeng Yang +4 more
openaire +1 more source
An integrated miniature capacitive pressure sensor
Sensors and Actuators A: Physical, 1991Abstract A newly designed capacitive pressure sensor which incorporates a CMOS IC on the same silicon chip has been developed. The sensor chip is 3.3 mm × 3.7 mm × 0.5 mm in size, and both the sensing capacitive element and the electronic circuit are hermetically sealed between the silicon substrate and the glass cover using a unique electrical ...
Takeshi Kudoh +2 more
openaire +1 more source
A textile based capacitive pressure sensor
Proceedings of IEEE Sensors, 2003This paper introduces an approach for decoding the pressure information exerted over a broad piece of fabric by means of capacitive sensing. The proposed sensor includes a distributed passive array of capacitors (i.e. an array where no active elements are involved), whose capacitance depends on the pressure exerted on the textile surface, and an ...
M. Sergio +4 more
openaire +1 more source
Transient response of capacitive pressure sensors
Sensors and Actuators A: Physical, 1992Abstract The responses of capacitive pressure sensors to step and impulse waveforms are computed for small deflections and low damping using the thin-plate theory. These sensors behave as second-order systems with one degree of freedom. From present and previous results, the expression of the transfer function is established.
P. Pons, G. Blasquez
openaire +1 more source
CMOS MEMS capacitive absolute pressure sensor
Journal of Micromechanics and Microengineering, 2013This paper presents the design, fabrication and characterization of a capacitive pressure sensor using a commercial 0.18??m CMOS (complementary metal?oxide?semiconductor) process and postprocess. The pressure sensor is capacitive and the structure is formed by an Al top electrode enclosed in a suspended SiO2?membrane, which acts as a movable electrode ...
M Narducci, L Yu-Chia, W Fang, J Tsai
openaire +1 more source
Symmetric differential capacitive pressure sensor
Review of Scientific Instruments, 1993Differential capacitive sensors are common to pressure gauges. Previous sensors of the bridge type have utilized only two variable (active) components, resulting in a half-bridge electrical equivalent circuit. There are numerous advantages of a symmetric full bridge, using four active components.
openaire +1 more source
Electronic circuits for capacitive pressure sensors
Images of the Twenty-First Century. Proceedings of the Annual International Engineering in Medicine and Biology Society, 2003Three different electronic circuits for characterizing the commercially available Orthoflex Hercules capacitive pressure sensors over the pressure range of 0-2 MPa are discussed. A portable microprocessor-based system is used to measure the pressure between the foot and the shoe.
A. Patel +3 more
openaire +1 more source
Transparent, Flexible, Conformal Capacitive Pressure Sensors with Nanoparticles
Small, 2018AbstractThe fundamental challenge in designing transparent pressure sensors is the ideal combination of high optical transparency and high pressure sensitivity. Satisfying these competing demands is commonly achieved by a compromise between the transparency and usage of a patterned dielectric surface, which increases pressure sensitivity, but decreases
Hyeohn Kim +10 more
openaire +2 more sources
A Capacitive MEMS Pressure Sensor With Wavy Membrane and Linear Capacitance-Pressure Response
Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- and Nanosystems, 2019Abstract A novel structure for capacitive MEMS pressure sensors is presented that can be used for a wide range of pressure sensing applications. The sensor is designed such that its characteristic capacitance-pressure (C-P) response is highly linear and could cover a wide range of working pressure.
Stephen Oke, Mohammad Shavezipur
openaire +1 more source