The Fabrication and Evaluation of a Capacitive Pressure Sensor Using Ru-Based Thin Film Metallic Glass with Structural Relaxation by Heat Treatment [PDF]
Sensors, 2023 Microelectromechanical systems (MEMS)-based capacitive pressure sensors are conventionally fabricated from diaphragms made of Si, which has a high elastic modulus that limits the control of internal stress and constrains size reduction and low-pressure ...
Hodaka Otsuka +4 more
doaj +2 more sources
A Theoretical Study on Static Gas Pressure Measurement via Circular Non-Touch Mode Capacitive Pressure Sensor [PDF]
SensorsA circular non-touch mode capacitive pressure sensor can operate in both transverse and normal uniform loading modes, but the elastic behavior of its movable electrode plate is different under the two different loading modes, making its input–output ...
Ji Wu, Xiao-Ting He, Jun-Yi Sun
doaj +2 more sources
Printed and Flexible Capacitive Pressure Sensor with Carbon Nanotubes based Composite Dielectric Layer [PDF]
Micromachines, 2019 Flexible pressure sensors have attracted tremendous attention from researchers for their widely applications in tactile artificial intelligence, electric skin, disease diagnosis, and healthcare monitoring.
Zhenxin Guo +9 more
doaj +2 more sources
A Capacitive Pressure Sensor Interface IC with Wireless Power and Data Transfer [PDF]
Micromachines, 2020 This paper presents a capacitive pressure sensor interface circuit design in 180 nm XH018 CMOS technology for an implantable capacitive pressure sensor, which has a wireless power supply and wireless data transfer function.
Chaoping Zhang +3 more
doaj +2 more sources
Porous Polydimethylsiloxane Elastomer Hybrid with Zinc Oxide Nanowire for Wearable, Wide-Range, and Low Detection Limit Capacitive Pressure Sensor [PDF]
Nanomaterials, 2022 We propose a flexible capacitive pressure sensor that utilizes porous polydimethylsiloxane elastomer with zinc oxide nanowire as nanocomposite dielectric layer via a simple porogen-assisted process.
Gen-Wen Hsieh +2 more
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Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges [PDF]
Micromachines, 2017 This article presents the design, manufacture and testing of a capacitive pressure sensor with a high, tunable performance to low compressive loads (<10 kPa) and a resolution of less than 0.5 kPa.
Vasileios Mitrakos +4 more
doaj +2 more sources
Development of Vacuum-Chamber-Type Capacitive Micro-Pressure Sensors [PDF]
MicromachinesThis study presents the development of a capacitive pressure sensor tailored for measuring the dynamic pressure of flow fields. The sensor is fabricated using the UMC 0.18 μm CMOS-MEMS process, incorporated with additional post-processing steps such as ...
Lung-Jieh Yang +5 more
doaj +2 more sources
Development of an Implantable Capacitive Pressure Sensor for Biomedical Applications. [PDF]
Micromachines (Basel), 2023 Roh JH, Shin KS, Song TH, Kim J, Lee DS.
europepmc +3 more sources
Flexible Capacitive Pressure Sensor Based on a Double-Sided Microstructure Porous Dielectric Layer. [PDF]
Micromachines (Basel), 2022 Yu Q, Zhang J.
europepmc +3 more sources
An Inductively Coupled Biodegradable Capacitive Pressure Sensor [PDF]
Proceedings, 2018 A biodegradable inductively coupled pressure sensor is presented. Three sensors were fabricated using melt processed biodegradable polymers and electron-beam evaporated magnesium. All the sensors showed similar pressure responses from 0 to 0.2 bar.
Aleksi Hänninen +3 more
doaj +3 more sources