Results 41 to 50 of about 9,421 (195)
Novel Designs for Application Specific MEMS Pressure Sensors
Sensors, 2010 In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application.
Erik V. Thomsen +3 more
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Airfoil Anemometer With Integrated Flexible Piezo-Capacitive Pressure Sensor
Frontiers in Materials, 2022 Demand is expected to accelerate for autonomous air vehicles that transport people and goods, making wind sensors on these vehicles and in the air space where they operate critical to ensure safe control of many simultaneous take-offs and landings ...
Arun K. Ramanathan +2 more
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An Electrostatic Servo Capacitive Pressure Sensor
IEEJ Transactions on Sensors and Micromachines, 1999 We have fabricated an electrostatic servo capacitive pressure sensor by using bulk silicon micromachining and SODIC(SOot-Deposited Integrated Circuit) wafer. The sensor consists of fixed electrodes and two diaphragms which are connected with pillars to move together for electrostatic servo force balancing. It detects pressure by the servo-voltage which
Yuzuru Ueda +3 more
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Three electrodes touch-mode capacitive pressure sensor [PDF]
Microsystem Technologies, 1998 A three-electrode capacitive pressure sensor for touch-mode operation with sensitivity of 0.030 pF/kPa (or 10.4 mV/kPa using CP-10 C/V converter circuit) in the pressure range of 170–280 kPa is presented with theoretical explanation of experimental results.
K.-M. Chang, G.-J. Hwang, Y.-L. Hsien
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Ultra-Sensitive Flexible Pressure Sensor Based on Microstructured Electrode
Sensors, 2020 Flexible pressure sensors with a high sensitivity in the lower zone of a subtle-pressure regime has shown great potential in the fields of electronic skin, human−computer interaction, wearable devices, intelligent prosthesis, and medical health ...
Mengmeng Li +3 more
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A wireless batch sealed absolute capacitive pressure sensor
Sensors and Actuators A: Physical, 2001 Abstract This paper reports the development of an absolute wireless pressure sensor that consists of a capacitive sensor and a gold-electroplated planar coil. Applied pressure deflects a 6 μm-thin silicon diaphragm, changing the capacitance formed between it and a metal electrode supported on a glass substrate.
Akar, O, Akin, T, Najafi, K
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SensorsThe design, especially the numerical calibration, of a circular touch mode capacitive pressure sensor is highly dependent on the accuracy of the analytical solution of the contact problem between the circular conductive membrane and the rigid plate of ...
Xiao-Ting He +3 more
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Measurement: Sensors, 2019 We present a highly elastic and flexible capacitive pressure/force sensing array assembled from elastic conductive thin films of carbon black composite.
Harish Devaraj +6 more
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IEEE Access, 2020 In this paper, a capacitive pressure sensor for high-temperature application is proposed. This sensor includes three parts: a capacitive pressure-sensitive chip fabricated from green tapes using lamination technology, a C-V conversion circuit fabricated ...
Chen Li +5 more
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3D printed capacitive pressure sensor with corrugated surface
2017 13th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME), 2017 In this work a novel 3D printed capacitive pressure sensor with a corrugated surface is presented. The design composed of top and bottom plates. The sensor is 3D printed using a commercially available polymer material and then coated with Cr and Au with sputtering process. The dimensions of produced structure that designed is 11 × 11 × 4.6mm3.
Tuna, Ahmet +3 more
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