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Transport Phenomena in Chemical Mechanical Polishing

Journal of The Electrochemical Society, 1999
Chemical mechanical polishing (CMP) is currently being used in the fabrication of integrated circuits and has been identified as an enabling technology for the semiconductor industry in its drive toward gigabit chips and subquartermicron feature sizes in the near future.
R. Shankar Subramanian   +2 more
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Exploring chemical phenomena

The integration of chemical phenomena into chemistry classes has been a topic of interest for reform efforts, particularly at the K-12 level. The next phase of this work builds on elements from K-12 science standards (three-dimensional learning) and involves the chemical phenomenon of dissolution (lithium chloride dissolving in water and heat ...
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Volatilization Phenomena and Chemical Reactions

1966
In § I.I we introduced the term ‘sample excitation’ to denote the group of processes that determine the radiation output of the source for a given sample. In theory, the aggregate of processes can be treated in separate steps; in practice, the processes take place jointly, however, and observed intensities therefore reflect overall effects.
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Transfer Phenomena and Chemical Kinetics

2010
Fundamental physical quantities such as mass, momentum and energy can be exchanged between portions of a system, or created during transformations through different processes such as convection, diffusion and chemical reactions. Convection is a type of mass exchange that is dependent upon the mean material velocity.
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Chemical Nature of Seismic Phenomena

2001
It has been shown that, in comparison with basalts, the products formed as a result of the processes of magma generation, earthquakes, volcanic activity, formation of lamproite and kimberlite tubes and others are enriched with light mantle elements.
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Transport Phenomena

Solved Problems in Thermodynamics and Statistical Physics, 2019
G. Skačej, P. Ziherl
semanticscholar   +1 more source

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