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Theoretical investigation on measurement range of a femtosecond laser chromatic confocal probe by utilizing side-lobe of axial response [PDF]
2018 IEEE International Conference on Advanced Manufacturing (ICAM), 2018 In this paper, by moving and adjusting the collecting lens suitably, the main-lobe is moved to the position where gap between main-lobe and side-lobe is located, aimed at solving the problem of discontinuous measurement range. So that the side-lobe of the axial response can be utilized for the purpose of extending the measurement range of the ...
Hiraku Matsukuma +2 more
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Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe [PDF]
JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, 2020 Abstract Confocal probes are widely employed in many industrial fields due to the depth-sectioning effect. The author’s group has also proposed a chromatic confocal probe employing a mode-locked femtosecond laser source which can realize an axial resolution of 30 nm and a measurement range of 40 μm Efforts have also been made to improve ...
Ryo Sato +3 more
semanticscholar +3 more sources
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Optics and Laser Technology, 2021
Abstract Inspecting a high-gradient freeform surface is a challenging task in manufacturing automation due to its complexity of the surface and high-aspect-ratio. On-machine measurement has shown remarkable achievements in ultra-precision manufacturing.
Yongqing Wang, Mengmeng Xi, Haibo Liu
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Abstract Inspecting a high-gradient freeform surface is a challenging task in manufacturing automation due to its complexity of the surface and high-aspect-ratio. On-machine measurement has shown remarkable achievements in ultra-precision manufacturing.
Yongqing Wang, Mengmeng Xi, Haibo Liu
exaly +3 more sources
A chromatic confocal probe with a mode-locked femtosecond laser source [PDF]
Optics and Laser Technology, 2018 Abstract The high spatial coherence and high stability of a mode-locked femtosecond laser source make it ideal for chromatic confocal imaging. Nevertheless, the high non-smoothness of spectrum of the mode-locked laser source often restricts its application in chromatic confocal probes for a wide range of depth measurement.
Xiuguo Chen +2 more
exaly +3 more sources
International Journal of Advanced Manufacturing Technology, 2016
On-machine measurement (OMM) involves the interruption of the machining process and the subsequent measurement of the workpiece without its removal from the machining tool. Chromatic confocal sensing is a well-known measurement technique that is able to evaluate the position of a point on an object surface along the optical axis of the system with high
Xicong Zou, Xuesen Zhao, Zengqiang Li
exaly +3 more sources
On-machine measurement (OMM) involves the interruption of the machining process and the subsequent measurement of the workpiece without its removal from the machining tool. Chromatic confocal sensing is a well-known measurement technique that is able to evaluate the position of a point on an object surface along the optical axis of the system with high
Xicong Zou, Xuesen Zhao, Zengqiang Li
exaly +3 more sources
A dual-detection chromatic confocal probe employing a mode-locked femtosecond laser
Optical Manufacturing and Testing 2024Confocal probes, which consists of a point light source and a point detector, have been widely used in the manufacturing industry for a surface profile measurement of a measurement target object. In recent years, a mode-locked laser, which has advantages;
Ryo Sato, Hiraku Matsukuma
exaly +3 more sources
On-Machine Metrology System Using Confocal Chromatic Probe and Motion Error Correction for Ultra-Precision Machine Tool [PDF]
JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, 2020 Abstract Aspherical or free-form optical surface machining using an ultra-precision machine tool is a common and effective method in precision optics manufacturing. However, this method sometimes causes waviness due to the machine’s motion in mid-spatial frequency (MSF) form deviations.
Hao Duan +4 more
semanticscholar +3 more sources
Measurement: Journal of the International Measurement Confederation, 2022
Mengmeng Xi, Yongqing Wang, Haibo Liu
exaly +3 more sources
Mengmeng Xi, Yongqing Wang, Haibo Liu
exaly +3 more sources
Measurement: Journal of the International Measurement Confederation, 2022
Qingliang Zhao
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Qingliang Zhao
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Measurement of Axial Position of a Microsphere Using Chromatic Confocal System for Probe System Based on the Laser Trapping with the Standing Wave Scale [PDF]
2014 International Symposium on Optomechatronic Technologies, 2014 We have proposed surface scanning measurement based on the laser trapping based probe with the standing wave scale (SWS). A scale resolution of SWS is subject to the wavelength of laser and of the hundred nm order, so the interpolation of the SWS is required.
Shin-Ichi Ueda +3 more
semanticscholar +3 more sources