Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser
This paper presents an intentional investigation of the effect of the object tilt angle on the tracking local minimum method (TL method), which is the one for detecting the measurement target position of the object optical axis, in a chromatic confocal probe employing a differential dual-fiber-detector optical system with a mode-locked femtosecond ...
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