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CMOS–MEMS integration today and tomorrow
Scripta Materialia, 2008 Abstract The integration of complementary metal oxide semiconductor (CMOS) and microelectromechanical systems (MEMS) can improve the performance of the MEMS, allows for smaller packages and leads to a lower packaging and instrumentation cost. Polycrystalline silicon–germanium (poly-SiGe) has already shown its potential for integrating MEMS and CMOS ...openaire +1 more sourceCMOS MEMS
Proceedings of 1997 IEEE International Symposium on Circuits and Systems. Circuits and Systems in the Information Age ISCAS '97, 2002 H. Baltes, A. Haberliopenaire +1 more sourceCMOS-MEMS resonators and their applications
2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC), 2013 This paper reports on the recent progress of the high-Q integrated micromechanical resonator, oscillator, and filter using the “CMOS-MEMS technology” to enable monolithic integration of MEMS and IC. The paper scope covers three major parts, including (i) the fabrication technologies of the CMOS-MEMS resonators and their associated circuitry; (ii) the ...openaire +1 more sourceCMOS-MEMS
2012 Dimitrios Peroulis, Prashant R. Waghmare, Sushanta K. Mitra, Supone Manakasettharn, J. Ashley Taylor, Tom N. Krupenkin, Wenguang Zhu, Gilbert Daniel Nessim, Francelyne Marano, Rina Guadagnini, Fernando Rodrigues-Lima, Jean-Marie Dupret, Armelle Baeza-Squiban, Sonja Boland, Jeong Young Park, Seajin Oh, Marc Madou, Yoke Khin Yap, Burcu Aslan, Hee Dong Han, Gabriel Lopez-Berestein, Anil K. Sood, Michael S.-C. Lu, Hongwei Qu, Huikai Xie, Huikai Xie, Ying Zhou, Larry L. Howell, A. T. Conlisk, Leonid V. Zhigilei, Alexey N. Volkov, Avinash M. Dongare, Zheng Yin, Yubo Fan, Stephen TC Wong, Vishal V. R. Nandigana, N. R. Aluru, Weicong Li, Harry Kwok, Reinhold Wannemacher +39 moreopenaire +1 more sourceCMOS MEMS Biosensors
2012 Dimitrios Peroulis, Prashant R. Waghmare, Sushanta K. Mitra, Supone Manakasettharn, J. Ashley Taylor, Tom N. Krupenkin, Wenguang Zhu, Gilbert Daniel Nessim, Francelyne Marano, Rina Guadagnini, Fernando Rodrigues-Lima, Jean-Marie Dupret, Armelle Baeza-Squiban, Sonja Boland, Jeong Young Park, Seajin Oh, Marc Madou, Yoke Khin Yap, Burcu Aslan, Hee Dong Han, Gabriel Lopez-Berestein, Anil K. Sood, Michael S.-C. Lu, Hongwei Qu, Huikai Xie, Huikai Xie, Ying Zhou, Larry L. Howell, A. T. Conlisk, Leonid V. Zhigilei, Alexey N. Volkov, Avinash M. Dongare, Zheng Yin, Yubo Fan, Stephen TC Wong, Vishal V. R. Nandigana, N. R. Aluru, Weicong Li, Harry Kwok, Reinhold Wannemacher +39 moreopenaire +1 more sourceCMOS MEMS Fabrication Technologies
2012 Dimitrios Peroulis, Prashant R. Waghmare, Sushanta K. Mitra, Supone Manakasettharn, J. Ashley Taylor, Tom N. Krupenkin, Wenguang Zhu, Gilbert Daniel Nessim, Francelyne Marano, Rina Guadagnini, Fernando Rodrigues-Lima, Jean-Marie Dupret, Armelle Baeza-Squiban, Sonja Boland, Jeong Young Park, Seajin Oh, Marc Madou, Yoke Khin Yap, Burcu Aslan, Hee Dong Han, Gabriel Lopez-Berestein, Anil K. Sood, Michael S.-C. Lu, Hongwei Qu, Huikai Xie, Huikai Xie, Ying Zhou, Larry L. Howell, A. T. Conlisk, Leonid V. Zhigilei, Alexey N. Volkov, Avinash M. Dongare, Zheng Yin, Yubo Fan, Stephen TC Wong, Vishal V. R. Nandigana, N. R. Aluru, Weicong Li, Harry Kwok, Reinhold Wannemacher +39 moreopenaire +1 more source
