Results 251 to 255 of about 7,213 (255)
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Piezoelectric aluminum nitride thin films for CMOS compatible MEMS: Sputter deposition and doping
Critical Reviews in Solid State and Materials SciencesSandeep, Rui M R Pinto, Ved Gund
exaly
CMOS-MEMS membrane for audio-frequency acoustic actuation
Sensors and Actuators A: Physical, 2002exaly
A high precision SOI MEMS–CMOS ±4g piezoresistive accelerometer
Sensors and Actuators A: Physical, 2014exaly
Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range
IEEE Electron Device Letters, 2008exaly
Fully quantitative characterization of CMOS–MEMS polysilicon/titanium thermopile infrared sensors
Sensors and Actuators B: Chemical, 2012exaly