Results 101 to 110 of about 274 (132)

On-chip ovenization of encapsulated Disk Resonator Gyroscope (drg)

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015
This paper reports, for the first time, a single-chip ovenization of a fully-encapsulated MEMS gyroscope to improve the stability of the scale factor and bias. We use the frequency output of the gyroscope as a thermometer, and, in turn heat the device through an on-chip silicon heater defined in the encapsulation layer.
C.H. Ahn, V.A. Hong, W. Park, Y. Yang, Y. Chen, E.J. Ng, J. Huynh, A.D. Challoner, K.E. Goodson, T.W. Kenny   +9 more
openaire   +2 more sources

Encapsulated disk resonator gyroscope with differential internal electrodes

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 2016
In this study we demonstrate for the first time integration of differential internal electrodes into a Disk Resonator Gyroscope (DRG) design within a wafer-scale encapsulation process. The differential internal electrodes design enables the mode-matching operation of the device with low DC power supplies (±5 V) thanks to the enhanced transduction area,
Chae HyuckAhn, Dongsuk D. Shin, Vu A. Hong, Yushi Yang, Eldwin J. Ng, Yunhan Chen, Ian B. Flader, Thomas W. Kenny   +7 more
openaire   +2 more sources

Disk resonator gyroscope with whole-angle mode operation

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings, 2015
We present a demonstration of a whole-angle mode operation of a 0.6 mm single-crystal silicon disk resonator gyroscope (DRG). This device has a Q factor of ~80,000 and a resonant frequency of ~250 kHz and is fabricated in the epi-seal process. Discrete-time control algorithms for rate-integrating gyro operation were implemented based on Lynch’s ...
Parsa Taheri-Tehrani, Oleg Izyumin, Igor Izyumin, Chae H. Ahn, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Thomas W. Kenny, Bernhard E. Boser, David A. Horsley   +9 more
openaire   +2 more sources

Stiffness-mass decoupled disk resonator gyroscope with enhanced performance

2018 IEEE Micro Electro Mechanical Systems (MEMS), 2018
Decaying time constant τ is one of the most important metrics for high performance vibrating gyroscopes. For MEMS based gyroscopic resonators, it is preferable to simultaneously realize high quality factor (Q) and low resonant frequency f 0 . In this paper, the thermo-elastic damping (TED) and f of disk resonator gyroscope are manipulated by hanging ...
Xin Zhou, Dingbang Xiao, Qingsong Li, Yi Xu, Peng Wang, Qian Hu, Zhanqiang Hou, Yulie Wu, Xuezhong Wu   +8 more
openaire   +2 more sources

Investigation on the way of adding lumped masses on disk resonator gyroscope

2017 IEEE SENSORS, 2017
This paper investigates the way of adding lumped masses on decaying time constant of the disk resonator gyroscope (DRG). Three typical ways of adding lumped masses are discussed and compared in detail. The longest decay time constant of 9.357 s is presented.
Xin Zhou, Xinjie Luo, Dingbang Xiao, Qingsong Li, Zhanqiang Hou, Kaixuan He, Yulie Wu, Xuezhong Wu   +7 more
openaire   +2 more sources

MEMS disk resonator gyroscope with integrated analog front-end

2013 IEEE SENSORS, 2013
We present a 2 mm diameter, 35 μm thick disk resonator gyro (DRG) fabricated in silicon with integrated 0.35 μm CMOS analog front-end circuits in the Invensense NF process. This process incorporates a wafer-level vacuum seal, yielding a quality factor (Q) of 2800 at the DRG's 78 kHz resonance frequency. After performing electrostatic tuning to enable
T.-H. Su, S. Nitzan, P. Taheri-Tehrani, M. Kline, B. Boser, D. A. Horsley   +5 more
openaire   +2 more sources

Stiffness-Mass Decoupled Honeycomb-like Disk Resonator Gyroscope

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019
We report, for the first time, the overall performance of a novel stiffness-mass decoupled honeycomb-like disk resonator gyroscope (HDRG). Compared with the former HDRG, this new design significantly increases the quality factor and effective mass of the resonator through hanging lumped masses on certain rings and arcs.
Yi Xu, Qingsong Li, Xin Zhou, Kai Gao, Peng Wang, Yongmeng Zhang, Zhanqiang Hou, Xuezhong Wu, Dingbang Xiao   +8 more
openaire   +2 more sources

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Flower-like disk resonator for gyroscopic application

Review of Scientific Instruments, 2022
In this paper, we propose a novel, flower-like disk resonator (FDR). The structure is made up of concentrically meander-shaped rings that are interconnected by straight beams, which have the potential to provide lower resonant frequency, lower frequency split, higher quality factor (Q), and longer decay time (τ).
Liutao Gu, Weiping Zhang, Haolin Lu, Yuting Wu, Chongyang Fan   +4 more
openaire   +2 more sources

Radially Pleated Disk Resonator for Gyroscopic Application

Journal of Microelectromechanical Systems, 2021
In this paper, we propose a radially pleated disk resonator for gyroscopic application. The structure is made up of concentrically nested radially pleated rings that are interconnected by straight spokes, which has the potential to provide higher thermo-elastic quality factor and larger vibration amplitude.
Xingjing Ren, Xin Zhou, Yi Tao, Qingsong Li, Xuezhong Wu, Dingbang Xiao   +5 more
openaire   +1 more source

A novel honeycomb-like disk resonant gyroscope

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017
This paper reports the design, fabrication and fundamental parameters testing of a novel honeycomb-like disk resonator gyroscope (HDRG). It has the same topological structure with the natural honeycomb and is composed of many interleaved hexagon cells, giving it the advantages of high space utilization ratio and excellent mechanical characteristics ...
Qingsong Li, Dingbang Xiao, Xin Zhou, Fenian Ou, Zhanqiang Hou, Xuezhong Wu   +5 more
openaire   +1 more source