Structural Analysis of Disk Resonance Gyroscope [PDF]
Micromachines, 2017 In this paper, we present two design methods to improve the performance of disk resonator gyroscope (DRG), including decreasing the frequency split and increasing the quality factor (Q).
Dunzhu Xia +3 more
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Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator [PDF]
Sensors, 2020 In this paper, the characterization of a whispering gallery mode (WGM) resonator applied in a novel micro-opto-electro-mechanical system (MOEMS) gyroscope was investigated.
Dunzhu Xia, Bing Zhang, Hao Wu, Tao Wu
doaj +3 more sources
A Digital Closed-Loop Sense MEMS Disk Resonator Gyroscope Circuit Design Based on Integrated Analog Front-end [PDF]
Sensors, 2020 A digital closed-loop system design of a microelectromechanical systems (MEMS) disk resonator gyroscope (DRG) is proposed in this paper. Vibration models with non-ideal factors are provided based on the structure characteristics and operation mode of the
Yihang Wang +6 more
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Development of a Novel Gear-like Disk Resonator Applied in Gyroscope
Applied Sciences, 2022 This paper proposes a novel gear-like disk resonator (GDR). The design, fabrication, and characterization of GDR are presented. In comparison with a ring-like disk resonator (RDR), a GDR replaces the circular rings with meander-shaped rings consisting of
Liutao Gu +3 more
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Machine learning-driven discovery of high-performance MEMS disk resonator gyroscope structural topologies [PDF]
Microsystems & NanoengineeringThe design of the microelectromechanical system (MEMS) disc resonator gyroscope (DRG) structural topology is crucial for its physical properties and performance.
Chen Chen +7 more
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Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PT [PDF]
Microsystems & Nanoengineering, 2023 Considering the evolution of rotation sensing and timing applications realized in micro-electro-mechanical systems (MEMS), flexural mode resonant shapes are outperformed by bulk acoustic wave (BAW) counterparts by achieving higher frequencies with both ...
Ozan Erturk +4 more
doaj +3 more sources
Automatic Mode-Matching Method for MEMS Gyroscope Based on Fast Mode Reversal [PDF]
MicromachinesProcessing errors can result in an asymmetric stiffness distribution within a microelectromechanical system (MEMS) disk resonator gyroscope (DRG) and thereby cause a mode mismatch and reduce the mechanical sensitivity and closed-loop scale factor ...
Feng Bu +4 more
doaj +3 more sources
Effect of Quadrature Control Mode on ZRO Drift of MEMS Gyroscope and Online Compensation Method [PDF]
Micromachines, 2022 The quadrature coupling error is an important factor that affects the detection output of microelectromechanical system (MEMS) gyroscopes. In this study, two quadrature error control methods, quadrature force-to-rebalance control (Mode I) and quadrature ...
Feng Bu, Shuwen Guo, Bo Fan, Yiwang Wang
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Removal of the rate table: MEMS gyrocompass with virtual maytagging [PDF]
Microsystems & Nanoengineering, 2023 High-performance micro-electro-mechanical system (MEMS) gyrocompasses for north-finding systems have been very popular for decades. In this paper, a MEMS north-finding system (NFS) based on virtual maytagging (VM) is presented for the first time.
Tongqiao Miao +7 more
doaj +2 more sources
Anti-aliasing multi-bit sigma-delta modulated cobweb-like disk resonator gyroscope with extending input range [PDF]
Microsystems & NanoengineeringA novel cobweb-like disk resonator gyroscope (CDRG) is introduced in this paper, which integrates a multi-bit electro-mechanical sigma-delta modulation (ΣΔΜ) system to significantly expand the input angular rate signal range, improving performance ...
Bo Fan +7 more
doaj +2 more sources