Results 151 to 160 of about 325,643 (162)
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CMP-free and CMP-less approaches for multilevel Cu/low-k BEOL integration
International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224), 2001M. Tsai +8 more
semanticscholar +1 more source
Improved two-step Brytal process for electropolishing of aluminum alloys
, 2018M. Sepulveda +3 more
semanticscholar +1 more source
Finite-Elements Simulation of Etch Front Propagation in Silicon Electropolishing Process
, 2014A. Ivanov, U. Mescheder, P. Woias
semanticscholar +1 more source
Journal of materials engineering and performance (Print)
M. Amiri +3 more
semanticscholar +1 more source
M. Amiri +3 more
semanticscholar +1 more source

