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METHOD FOR ELECTROCHEMICALLY ETCHING A SEMICONDUCTOR STRUCTURE
2019OLIVER RACHEL A +3 more
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Micromachining of p-type 6H–SiC by electrochemical etching
Sensors and Actuators A: Physical, 2004exaly
METHOD AND APPARATUS FOR RADIATION-ASSISTED ELECTROCHEMICAL ETCHING, AND ETCHED PRODUCT
2004IZUO SHINICHI +3 more
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Semiconductor wafer to be etched electrochemically
1992NOJIRI HIDETOSHI, UCHIYAMA MAKOTO
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SELECTIVE, ELECTROCHEMICAL ETCHING OF A SEMICONDUCTOR
2015DAHAL RAJENDRA P +2 more
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