Results 11 to 20 of about 21,175 (304)
Gold Ion Beam Milled Gold Zero-Mode Waveguides
Nanomaterials, 2022 Zero-mode waveguides (ZMWs) are widely used in single molecule fluorescence microscopy for their enhancement of emitted light and the ability to study samples at physiological concentrations.
Troy C. Messina +4 more
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80 K cryogenic stage for ice lithography
Micro and Nano Engineering, 2022 We present a cryogenic system design and development for ice lithography. The cryo-stage is designed with embedded channels to allow direct liquid nitrogen flow, enabling fast cryogenic cooling, and low sample temperature.
Rubaiyet I. Haque +4 more
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Materials for Quantum Technology, 2023 In this Perspective article, we evaluate the current state of research on the use of focused electron and ion beams to directly fabricate nanoscale superconducting devices with application in quantum technologies.
José María De Teresa
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Nanomaterials, 2022 Recent developments in nanoprinting using focused electron beams have created a need to develop analysis methods for the products of electron-induced fragmentation of different metalorganic compounds.
Jakub Jurczyk +8 more
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Substrate Effect in Electron Beam Lithography
Advances in Electrical and Electronic Engineering, 2018 Electron Beam Lithography (EBL) process strongly depends on the type of the applied lithographic system, composed of electron sensitive polymers and the substrate. Moreover, applied acceleration voltage changes the volume of Backscattered Electrons (BSE)
Kornelia Indykiewicz +2 more
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Tailoring electron beams with high-frequency self-assembled magnetic charged particle micro optics
Nature Communications, 2022 Electron beam manipulation is important for their application in microscopes, lithography instruments, and colliders. Here the authors report a wafer scale, self-assembled, microcoil electrically-driven magnetic charge particle optic device that can be ...
R. Huber +13 more
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Analysis of issues in gate recess etching in the InAlAs/InGaAs HEMT manufacturing process
ETRI Journal, 2023 We have developed an InAlAs/InGaAs metamorphic high electron mobility transistor device fabrication process where the gate length can be tuned within the range of 0.13 μm–0.16 μm to suit the intended application.
Byoung-Gue Min +7 more
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Evolution in Lithography Techniques: Microlithography to Nanolithography
Nanomaterials, 2022 In this era, electronic devices such as mobile phones, computers, laptops, sensors, and many more have become a necessity in healthcare, for a pleasant lifestyle, and for carrying out tasks quickly and easily.
Ekta Sharma +6 more
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AIP Advances, 2012 A maskless method of electron beam lithography is described which uses the reflection of an electron beam from an electrostatic mirror to produce caustics in the demagnified image projected onto a resist–coated wafer. By varying the electron optics, e.g.
S. M. Kennedy +5 more
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Direct Write Protein Patterns for Multiplexed Cytokine Detection from Live Cells Using Electron Beam Lithography. [PDF]
ACS Nano, 2016 Lau UY +4 more
europepmc +3 more sources