Results 191 to 200 of about 21,175 (304)

Inverse Lithography Technology (ILT) Under Chip Manufacture Context. [PDF]

Micromachines (Basel)
Meng X, Chen C, Ni J.
europepmc   +1 more source

Computer Simulation of Processes at Electron and Ion Beam Lithography, Part 1: Exposure Modeling at Electron and Ion Beam Lithography

, 2010
Katia Vutova, G. Mladenov
openalex   +2 more sources

Engineering Thermal Emission with Enhanced Emissivity and Quality Factor Using Bound States in the Continuum and Electromagnetically Induced Absorption

Advanced Optical Materials, EarlyView.
A metal‐based thermal metasurface supporting bound states in the continuum is demonstrated and experimentally shown to achieve a record‐high quality factor of 202 and high emissivity of 0.82. The design offers thermally stable, narrowband mid‐infrared emission, making it ideal for high‐precision gas sensing applications.
Guodong Zhu, Ikjun Hong, Kewei Li, Theodore Anyika, Maxwell T. Ugwu, J. Ryan Nolen, Mingze He, Joshua D. Caldwell, Justus C. Ndukaife   +8 more
wiley   +1 more source

Photonic Hybrid Integration: Strategies and Promises of Advanced Additive Manufacturing

Advanced Optical Materials, EarlyView.
Heterogeneous photonic integration combines wafer bonding, transfer printing, and advanced multi‐photon lithography to realize compact, adaptable photonic systems. This review highlights breakthroughs in hybrid materials, metrology, and 4D printing, revealing how the convergence of traditional and emerging fabrication unlocks scalable, high‐performance
Zhitian Shi, Huiyu Huang, Richard Penty, Qixiang Cheng   +3 more
wiley   +1 more source

A Single-Layer Full-Color Diffractive Waveguide by Lithography. [PDF]

Nanomaterials (Basel)
Li Y, Wu F, Li H, Yang H, Wang M, Zheng Z.   +5 more
europepmc   +1 more source

Responsive Visible‐Wavelength Metasurfaces from Porous Silicon Based on Fano Guided‐Mode Resonance

Advanced Optical Materials, EarlyView.
The article introduces mesoporous silicon metasurfaces (pSi‐MS) supporting Fano guided‐mode resonances in the visible regime. By combining top‐down lithographic patterning of 2D gratings with bottom‐up electrochemical porosification, the approach realizes a new class of responsive metasurfaces, enabling highly sensitive and portable platforms for small
Tomoshree Dash, Saddam Gafsi, Estevao Marques Dos Santos, Ivan Kravchenko, Judson D. Ryckman   +4 more
wiley   +1 more source

Low-loss silicon nitride Kerr-microresonators fabricated with metallic etch masks via metal lift-off. [PDF]

Sci Rep
Colación GM, Rukh L, Buck FH, Drake TE.
europepmc   +1 more source

Yielding Behaviour of Electron Beam Lithography and Focused Ion Beam Made Nanocrystalline Micro/Nanopillars

, 2016
Matthew P. Sedore
openalex   +1 more source

Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography

, 2019
Kohei Goto, Jun Taniguchi
openalex   +1 more source