Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope. [PDF]
Camino FE+6 more
europepmc +1 more source
Photonic Crystal Enhanced Microscopy on a 2D Photonic Crystal Surface
This work demonstrates the design, fabrication, and the first‐time test of a 2D photonic crystal surface for photonic resonator absorption microscopy. The designed surface uniformly enhances electromagnetic near fields, achieving > 100% improved detecting uniformity for surface‐captured AuNPs from a blocking biosensor assay aimed for detecting SARS‐CoV‐
Weinan Liu+5 more
wiley +1 more source
Crosslinking-induced patterning of MOFs by direct photo- and electron-beam lithography. [PDF]
Tian X+13 more
europepmc +1 more source
Soft X-ray varied-line-spacing gratings fabricated by near-field holography using an electron beam lithography-written phase mask. [PDF]
Lin D+14 more
europepmc +1 more source
Sub-10-nm half-pitch electron-beam lithography by using poly(methyl methacrylate) as a negative resist [PDF]
Huigao Duan+5 more
openalex +1 more source
Advanced Optical Integration Processes for Photonic‐Integrated Circuit Packaging
Photonic integrated chip packaging is a growing technology that helps make devices faster, more efficient, and more compact by using light instead of electricity. This review highlights recent progress in making these chips work better at different levels, discusses current challenges like heat and alignment, and looks at future possibilities for ...
Keuntae Baek+4 more
wiley +1 more source
Interfacial Electron Beam Lithography Converts an Insulating Organic Monolayer to a Patterned Single-Layer Conductor with Puzzling Charge Transport Performance. [PDF]
Maoz R+8 more
europepmc +1 more source
Electron-beam lithography for polymer bioMEMS with submicron features. [PDF]
Scholten K, Meng E.
europepmc +1 more source
Performance characterization of negative resists for sub-10-nm electron beam lithography [PDF]
Ravi Bonam+3 more
openalex +1 more source