Results 311 to 318 of about 81,341 (318)
Some of the next articles are maybe not open access.
Instrumentation for electron beam lithography
IEEE Transactions on Magnetics, 1974openaire +2 more sources
Electron-beam lithography machines
1980DONALD R. HERRIOTT, GEORGE R. BREWER
openaire +2 more sources
Progress and challenges in electron beam lithography
Microelectronic Engineering, 1989openaire +2 more sources