Results 291 to 300 of about 245,592 (331)

Multibeam electron source for nanofabrication using electron beam induced deposition

Microelectronic Engineering, 2006
A multibeam electron beam induced deposition (EBID) system is presented, which can be used for the fabrication of sub-10nm structures with EBID. This system consists of a scanning electron microscope (SEM) column and a modified source section with a microfabricated lens array.
M.J. van Bruggen, B. van Someren, P. Kruit   +2 more
openaire   +1 more source

Electron Beam-Induced Nano-Deposition Using a Transmission Electron Microscope

Materials Science Forum, 2005
Nanometre-sized structures were fabricated by electron beam-induced deposition in a scanning transmission electron microscope. A small amount of metal-organic gases, W(CO)6 and dimethyl acetylacetonato gold, were introduced near a substrate in the chamber of the microscope.
Masayuki Shimojo, Kazutaka Mitsuishi, M. Tanaka, M. Song, Kazuo Furuya   +4 more
openaire   +1 more source

Focused electron beam-induced deposition at cryogenic temperatures

Journal of Materials Research, 2011
Abstract
M. Bresin, B.L. Thiel, M. Toth, K.A. Dunn   +3 more
openaire   +1 more source

Applications of Electron Beam Induced Deposition in nanofabrication

2008 7th International Caribbean Conference on Devices, Circuits and Systems, 2008
This paper presents applications in which electron beam induced deposition (EBID) is used to characterize, analyze, and fabricate, nanostructures and devices. High aspect ratio cylindrical ultra sharp (CUS) atomic force microscope (AFM) probe tips are grown on discarded AFM tips using EBID.
Jay A. Bieber, Javier F. Pulecio, Wilfrido A. Moreno   +2 more
openaire   +1 more source

Electron beam induced selective etching and deposition technology

Superlattices and Microstructures, 1990
Abstract W deposition, using a WF 6 source by electron beam induced surface reaction, has been studied by Auger electron spectroscopy (AES) and transmission electron microscopy (TEM). The initial growth process has been observed in situ by AES and TEM.
Shinji Matsui, Toshinori Ichihashi, Masakazu Baba, Akinobu Satoh   +3 more
openaire   +1 more source

Technology basis and perspectives on focused electron beam induced deposition and focused ion beam induced deposition

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2014
Abstract The main characteristics of focused electron beam induced deposition (FEBID) and focused ion beam induced deposition (FIBID) are presented. FEBID and FIBID are two nanopatterning techniques that allow the fabrication of submicron patterns with nanometer resolution on selected locations of any kind of substrate, even on highly structured ...
openaire   +1 more source

Electron Beam Induced Nanometer Scale Deposition

2002
Applied ...
openaire   +1 more source

Multi-electron beam system for high resolution electron beam induced deposition

2008
Applied ...
openaire   +1 more source

Electron-Beam-Induced Deposition

2012
Mélanie Auffan, Catherine Santaella, Alain Thiéry, Christine Paillès, Jérôme Rose, Wafa Achouak, Antoine Thill, Armand Masion, Mark Wiesner, Jean-Yves Bottero, Florence Mouchet, Périne Landois, Floriane Bourdiol, Isabelle Fourquaux, Pascal Puech, Emmanuel Flahaut, Laury Gauthier, Malgorzata J. Rybak-Smith, Youngjun Song, Michael J. Heller, David Holmes, Benjamin L. J. Webb, Tao Sun, Theresa S. Mayer, Jeffrey S. Mayer, Christine D. Keating, Amitabha Ghosh, Ilya V. Pobelov, Chen Li, Thomas Wandlowski, Michael G. Helander, Zhibin Wang, Zheng-Hong Lu, Francesca Carpino, Larry R. Gibson, Dane A. Grismer, Paul W. Bohn, Nezih Pala, Mustafa Karabiyik, Alexandra Porter, Eva McGuire, Guoqiang Xie, Alejandro Lopez-Bezanilla, Stephan Roche, Eduardo Cruz-Silva, Bobby G. Sumpter, Vincent Meunier, Michael J. Laudenslager, Wolfgang M. Sigmund, Neal A. Hall, CJ Kim, Guoxing Wang, Robert J. Greenberg, Chimaobi Mbanaso, Gregory Denbeaux, Claire Coutris, Erik J. Joner   +56 more
openaire   +1 more source

On-chip electro-optic frequency shifters and beam splitters

Nature, 2021
Yaowen Hu, Mengjie Yu, Di Zhu
exaly