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Electron probe microanalysis

1995
Electron probe microanalysis makes use of the X-ray spectrum emitted by a solid sample bombarded with a focused beam of electrons to obtain a localized chemical analysis. All elements from atomic number 4 (Be) to 92 (U) can be detected in principle, though not all instruments are equipped for ‘light’ elements (Z < 10). Qualitative analysis involves the
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Electron probe microanalysis

Surface Science, 1971
Abstract Electron probe microanalysis has been reviewed with special emphasis on beam target interactions. Methods for the quantitative interpretation of X-ray data obtained by this technique are discussed and compared. Modifications in the theory are described for the special case of the analysis of surface layers.
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Electron Probe Microanalysis

2018
When an accelerated electron strikes a substance, it sometimes ejects the inner shell electron of the atom existing in the substance and creates a vacancy. This phenomenon is called electron beam excitation.
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