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Mapping of mobile charges on insulator surfaces with the electrostatic force microscope
Applied Physics Letters, 1993Migration of surface ions in lateral fields on insulator surfaces may modify the electrical characteristics of underlying semiconductor structures causing device instabilities. A high sensitivity electrostatic force microscope is used to image the movement and spatial distribution of surface ions on Si3N4.
K. Domanský +4 more
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Japanese Journal of Applied Physics, 1999
A simple method for measuring the microscopic spatial distribution of the acoustic radiation force by exploiting the competition between the acoustical radiation force and the electrostatic force on charged microspheres is investigated. First, the effective charge of polystyrene spheres is measured by monitoring the mobility of the ...
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A simple method for measuring the microscopic spatial distribution of the acoustic radiation force by exploiting the competition between the acoustical radiation force and the electrostatic force on charged microspheres is investigated. First, the effective charge of polystyrene spheres is measured by monitoring the mobility of the ...
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International Journal of Nanoscience, 2003
Various sources, which affect the resolution of the electrostatic force microscope, are discussed. In addition to an overall hump due to the finite distribution of charges, we find that the electrostatic force versus lateral position plot shows better resolution in certain scanning directions, and in some others it may even exhibit misleadingly ...
T. M. HONG +3 more
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Various sources, which affect the resolution of the electrostatic force microscope, are discussed. In addition to an overall hump due to the finite distribution of charges, we find that the electrostatic force versus lateral position plot shows better resolution in certain scanning directions, and in some others it may even exhibit misleadingly ...
T. M. HONG +3 more
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Physical Review B, 2003
Dynamic force curves of an atomic force microscope in the presence of attractive van der Waals and electrostatic forces are analytically treated using a variational method taking into account nonlinear tip-sample coupling. This approach allows describing and understanding the motion of a voltage-biased tip observed in experimental approach-retract ...
R. Dianoux +5 more
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Dynamic force curves of an atomic force microscope in the presence of attractive van der Waals and electrostatic forces are analytically treated using a variational method taking into account nonlinear tip-sample coupling. This approach allows describing and understanding the motion of a voltage-biased tip observed in experimental approach-retract ...
R. Dianoux +5 more
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Modeling and analysis of a scanning electrostatic force microscope for surface profile measurement
SPIE Proceedings, 2013This paper presents the analysis of a prototype scanning electrostatic force microscope (SEFM) system developed for noncontact surface profile measurement. In the SEFM system, with a dual height method, the distance between the probe tip and the sample surface can be accurately obtained through removing the influence of the electric field distribution ...
Zhigang Jia +5 more
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, 2022