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Selective laser-induced etching for novel 3D microphotonic devices
LASEIn this work, we evaluate the advantages and limitations of the Selective Laser-induced Etching (SLE) process for the fabrication of novel three-dimensional microresonator structures.
Lara Beckmann +6 more
semanticscholar +1 more source
Etching-assisted femtosecond laser microfabrication
Chinese Physics B, 2018Monan Liu +3 more
semanticscholar +1 more source
Microfabrication by Laser Lithography Combined with Ion Etching
, 2018Zhiyu Zhang, Ruoqiu Wang, Donglin Xue
semanticscholar +1 more source
3D microfabrication in YAG crystals by direct laser writing and chemical etching
2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR), 2013D. Choudhury +4 more
semanticscholar +1 more source
Microfabrication and evaluation of diffractive optical filters prepared by reactive sputter etching
, 1980 openalex +1 more source
Microfabrication for Si wafers by FAB etching
, 1993 Takashi Nishimura +2 more
openalex +1 more source
Si etching in high-density SF6 plasmas for microfabrication: surface roughness formation
, 2004 Εvangelos Gogolides
openalex +1 more source
Direct writing for three-dimensional microfabrication using synchrotron radiation etching
, 2001 Takanori Katoh +4 more
openalex +1 more source