Results 261 to 270 of about 189,870 (274)

Controlled Microfabrication of High‐Aspect‐Ratio Structures in Silicon at the Highest Etching Rates: The Role of H2O2 in the Anodic Dissolution of Silicon in Acidic Electrolytes

, 2017
C. Cozzi, G. Polito, K. Kolasinski, G. Barillaro   +3 more
semanticscholar   +1 more source

Chemically Assisted Ion Beam Etching for Silicon‐Based Microfabrication

Journal of The Electrochemical Society, 1994
P. Chapman, Y. S. Chieh, J. P. Krusius
openaire   +2 more sources

Microfabrication and evaluation of diffractive optical filters prepared by reactive sputter etching

, 1980

openalex   +1 more source

Orientation-Resolved Chemical Kinetics: Using Microfabrication to Unravel the Complicated Chemistry of KOH/Si Etching

, 2002
Rikard A. Wind, H.A. Jones, Michael J. Little, Melissa A. Hines   +3 more
openalex   +1 more source

Single-mask, three-dimensional microfabrication of high-aspect-ratio structures in bulk silicon using reactive ion etching lag and sacrificial oxidation

, 2004
Masaru P. Rao, Marco Aimi, Noel C. MacDonald   +2 more
openalex   +1 more source

Microfabrication of Zinc oxide surface by wet etching technique

, 2004
Kenji Takahashi, Naoki Ohashi, Isao Sakaguchi, Shunichi Hishita, Hiroshi Funakubo, Hajime Haneda   +5 more
openalex   +1 more source

Smooth And Clean Dry Etching Of GaAs And InP For OIEC Microfabrication

LEOS 1991 Summer Topical Meetings on Epitaxial Materials and In-Situ Processing for Optoelectronic Devices. Photonics and Optoelectronics, 2005
openaire   +2 more sources

Reactor to feature scale simulation studies of SiO<inf>2</inf> etching in C<inf>2</inf>F<inf>6</inf> plasma for microfabrication

, 2007
Rajesh Rajesh, A.K. Paul, A. K. Dimri
openalex   +1 more source

Microfabrication by ion-beam etching

Vacuum, 1980
openaire   +1 more source

Microfabrication by localized electrodeposition and etching

Metal Finishing, 1998
openaire   +1 more source