Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching
Microfabrication of a Fluoropolymer Film Using Conventional XeCl Excimer Laser by Laser-Induced Backside Wet Etching
Microfabrication of Zinc oxide surface by wet etching technique
Single-mask, three-dimensional microfabrication of high-aspect-ratio structures in bulk silicon using reactive ion etching lag and sacrificial oxidation
Microfabrication of holographic blazed grating by reactive ion beam etching
, 2004 
, 2004