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Microfabrication of LiNbO3 by Reactive Ion-Beam Etching
Japanese Journal of Applied Physics, 1980The ratio of the etching rate of LiNbO3 to AZ1350 at normal incidence for CHF3 ion is about 5 times as large as that for Ar ion. This high ratio is utilized to fabricate LiNbO3 blazed gratings and also LiNbO3 guided wave optical elements such as grating couplers to demonstrate that reactive ion-beam etching is a very useful microfabrication ...
Shinji Matsui +3 more
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Application of SR-excited etching to microfabrication
Optics & Laser Technology, 1994Shingo Terakado, Shigeo Suzuki
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Etching-assisted femtosecond laser microfabrication
Chinese Physics B, 2018Monan Liu +3 more
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Microfabrication of On-Demand Tapered Glass Capillaries by Etching Combined With Polishing
Journal of Microelectromechanical Systems, 2022Chunyang Wei +7 more
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Advances in glass Microfabrication Femtosecond laser irradiation followed by chemical etching
2012Femtosecond laser irradiation followed by chemical etching (F.L.I.C.E.) is an emerging technique for the fabrication of directly buried, three-dimensional microfluidic channels in silica. The procedure attested in literature, which has been widely studied in the past years, consists of irradiating a glass slab and subsequently apply a chemical etching ...
Venturini +9 more
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Microfabrication by localized electrodeposition and etching
Metal Finishing, 1998openaire +1 more source
Microfabrication by Laser Lithography Combined with Ion Etching
2018Zhiyu Zhang, Ruoqiu Wang, Donglin Xue
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Chemically Assisted Ion Beam Etching for Silicon‐Based Microfabrication
Journal of The Electrochemical Society, 1994Y. S. Chieh, J. P. Krusius, P. Chapman
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4039. Microfabrication in LiNbO3 by ion-bombardment-enhanced etching. (USA)
Vacuum, 1979openaire +1 more source