Results 81 to 90 of about 189,870 (274)
Recent Developments in Mems-Based Micro Fuel Cells [PDF]
, 2006 Micro fuel cells ($\mu$-FC) represent promising power sources for portable applications. Today, one of the technological ways to make $\mu$-FC is to have recourse to standard microfabrication techniques used in the fabrication of micro electromechanical ...
Gauthier-Manuel, B., Pichonat, T.
core +4 more sources
Detachable three-layer Au absorber microfabrication for low-temperature detectors
Micro and Nano Engineering, 2023 Low temperature detectors (LTDs) used for decay energy spectrometry (DES) can provide accurate and reliable decay data thanks to their high-energy resolution and a near 100% detection efficiency for the radiations of interest. However, it is essential to
Jawad Hadid +7 more
doaj
Method to pattern etch masks in two inclined planes for three-dimensional nano- and microfabrication [PDF]
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2011 The authors present a method to pattern etch masks for arbitrary nano- and microstructures on different, inclined planes of a sample. Our method allows standard CMOS fabrication techniques to be used in different inclined planes; thus yielding three-dimensional structures with a network topology.
Tjerkstra, R.W. +5 more
openaire +6 more sources
High Aspect Ratio, Superconducting Vacuum Gap Capacitor NEMS with Plate Distances Down to 32 nm
Advanced Materials Technologies, EarlyView.Fabrication of aluminium vacuum gap capacitor based NEMS is investigated with a free to move top electrode. To avoid collapse of the top electrode vertical stress gradient is controlled through sputter parameters. The result is wafer‐level high‐yield fabrication of vacuum gap capacitors with radii between 7 µm and 30 µm and integrated piezoactuators. A
Ioan Ignat, Daniel Platz, Ulrich Schmid
wiley +1 more source
Impact of open de-ionized water thin film laminar immersion on the liquid immersed ablation threshold and ablation rate of features machined by KrF excimer laser ablation of bisphenol A polycarbonate [PDF]
, 2009 Debris control and surface quality are potential major benefits of sample liquid immersion when laser micromachining; however, the use of an immersion technique potentially modifies the ablation mechanism when compared to an ambient air interaction.
C.F. Dowding +23 more
core +2 more sources
A versatile patterning process based on easily soluble sacrificial bilayers
AIP Advances, 2017 Development of a microfabrication process is essential to embed fascinating physical properties of functional materials into mesoscopic devices. Different from well-investigated materials with established microfabrication process, newly-discovered ...
Takayuki Harada, Atsushi Tsukazaki
doaj +1 more source
A statistical method to optimize the chemical etching process of zinc oxide thin films
Royal Society Open Science, 2022 Zinc oxide (ZnO) is an attractive material for microscale and nanoscale devices. Its desirable semiconductor, piezoelectric and optical properties make it useful in applications ranging from microphones to missile warning systems to biometric sensors ...
David D. Lynes +5 more
doaj +1 more source
Artificially Weaved Textile‐like Surface Micromachined Graphene‐Polymer Flexible Bioelectrodes
Advanced Materials Technologies, EarlyView.This study reports on the engineering of microscale textured surfaces of SU‐8/PMMA polymer composites much like a “weft‐warp” pattern to resemble “artificially‐weaved” textiles. These microstructured surfaces enable conformal layering of functional reduced graphene oxide (rGO), all‐in‐all offering favorable features including remarkable self ...
Seba Nur Alhasan +6 more
wiley +1 more source
Micro and Nano Systems Letters, 2018 Silicon wet anisotropic etching based bulk micromachining technique is widely used for the fabrication of microelectromechanical systems components. In this technique of microfabrication, alignment of mask edges with crystallographic directions plays a ...
Avvaru Venkata Narasimha Rao +3 more
doaj +1 more source
Advanced Materials Technologies, EarlyView.A novel multi‐stamping on multi‐prestrain (MSMP) process is proposed, where sensor elements are transferred onto a substrate under different prestrains (0–150%) within a single integrated platform. This MSMP approach not only resolves the mismatch issue in stretchable wearable electronics, but also ensures that each sensor element exhibits optimal ...
Jae In Kim +9 more
wiley +1 more source