Collective fabrication of guided longitudinal SAW resonator without Bragg grating mirror
This Research article document discussed about a new structure composed of a sub‐micron‐thick layer of a single‐crystal piezoelectric material on a substrate.
Thomas Baron +12 more
doaj +1 more source
Microfabrication of Si by KOH Etchant Using Etching Mask Amorphized by Ar Ion Beam [PDF]
Mina Sato +2 more
openalex +1 more source
Method to pattern etch masks in two inclined planes for three-dimensional nano- and microfabrication [PDF]
The authors present a method to pattern etch masks for arbitrary nano- and microstructures on different, inclined planes of a sample. Our method allows standard CMOS fabrication techniques to be used in different inclined planes; thus yielding three-dimensional structures with a network topology.
Tjerkstra, R.W. +5 more
openaire +6 more sources
Facile Deep Brain Electrode Coating with MXene for Improved Electrode Performance
Facile dip‐coating of commercial carbon fiber electrodes with Ti3C2Tx MXene improves electrical conductivity, reduces impedance, and enables single‐neuron recordings in the rat hippocampus over four weeks. The coating maintains biocompatibility, minimizes inflammation, and remains MRI‐compatible.
Laura Kondrataviciute +5 more
wiley +1 more source
Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube [PDF]
In this paper we present the first investigation of a batch method for folding of threedimensional micrometer-sized silicon nitride structures by capillary forces.
Abelmann, L. +5 more
core +1 more source
A versatile patterning process based on easily soluble sacrificial bilayers
Development of a microfabrication process is essential to embed fascinating physical properties of functional materials into mesoscopic devices. Different from well-investigated materials with established microfabrication process, newly-discovered ...
Takayuki Harada, Atsushi Tsukazaki
doaj +1 more source
A statistical method to optimize the chemical etching process of zinc oxide thin films
Zinc oxide (ZnO) is an attractive material for microscale and nanoscale devices. Its desirable semiconductor, piezoelectric and optical properties make it useful in applications ranging from microphones to missile warning systems to biometric sensors ...
David D. Lynes +5 more
doaj +1 more source
Engineered heart tissues (EHTs) are a valuable approach in capturing human cardiac physiology and drug responses in vitro. Here, a novel tapered pillar design is developed in an EHT platform to confine tissues in a predefined position‐ at the middle of the pillar height.
Milica Dostanić +9 more
wiley +1 more source
Aerosol jet printing enables rapid, customizable fabrication of flexible, fully gold multi‐electrode arrays (MEAs) for organotypic bioelectronic interfaces. The printed MEAs exhibit stable electrochemical performance, cytocompatibility, and functionality in recording and stimulation, including integration with 3D‐printed constructs.
Ernest Cheah +7 more
wiley +1 more source
3D Neuro-electronic interface devices for neuromuscular control: Design studies and realisation steps [PDF]
In order to design the shape and dimensions of new 3D multi-microelectrode information transducers properly, i. e. adapted to the scale of information delivery to and from peripheral nerve fibres, a number of studies were, and still are, being performed ...
Frieswijk, Theo A. +4 more
core +2 more sources

