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Impact of Rapid Thermal Annealing on the Structural and Piezoelectric Properties of AlN Thin Films

open access: yesAdvanced Electronic Materials, EarlyView.
Aluminum nitride (AlN) is a biocompatible piezoelectric material suitable for energy harvesting in MEMS resonators. Through rapid thermal annealing, a threshold for CMOS‐compatible processes is established. AlN improved its crystallinity and enhanced the piezoelectric coefficient by ∼160%. Devices show an improvement in the electromechanical properties
Laura Mazón‐Maldonado   +7 more
wiley   +1 more source

Don't give up on politics. [PDF]

open access: yesEur J Public Health
Burris S.
europepmc   +1 more source

Correction: Cutaneous α-Synuclein Pathology as a Differential Marker: A Histological and Statistical Comparison across Neurodegenerative Disease Groups. [PDF]

open access: yesJ Mol Neurosci
Šebelová D   +11 more
europepmc   +1 more source
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A method for balancing the terrestrial water budget and improving the estimation of individual budget components

Agricultural and Forest Meteorology, 2023
Lunche Wang, Xiaobo Wang, Lizhe Wang
exaly  

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