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Mirror plate for a fabry-perot interferometer and a fabry-perot interferometer

A method for producing a mirror plate for a Fabry-Perot interferometer includesproviding a substrate, which includes silicon,implementing a semi-transparent reflective coating on the substrate,forming a passivated region in and/or on the substrate by etching a plurality of voids in the substrate, and by passivating the surfaces of the voids,forming a ...
Varpula, Aapo   +2 more
openaire  

Microelectromechanical (MEMS) fabry-perot interferometer, apparatus and method for manufacturing fabry-perot interferometer

A microelectromechanical (MEMS) Fabry-Perot interferometer includes a transparent substrate; a first metallic mirror structure on the transparent substrate, including a first metal layer and a first support layer; a second metallic mirror structure above the first metallic mirror structure on an opposite side of the first metallic mirror structure in ...
Saari, Heikki, Guo, Bin, Rissanen, Anna
openaire  

High sensitivity temperature sensor based on fiber air-microbubble Fabry-Perot interferometer with PDMS-filled hollow-core fiber

Sensors and Actuators A: Physical, 2018
Mao-qing Chen   +4 more
semanticscholar   +1 more source

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