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Wafer 3D effect study with finite difference time domain (FDTD) simulation method
2015 China Semiconductor Technology International Conference, 2015As the technology reaches the 2x nm node in semiconductor manufacture, wafer 3-dimensional topography proximity effects (W3D) becomes more and more challenging during lithography process, especially for the implantation layers. This effect is caused by the light reflection from the substrate during wafer-exposure process, which can cause the linewidth ...
null Liwan Yue +3 more
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Electro-Acoustic Scattering using Finite Difference Time Domain Method (FDTD)
2022 IEEE Microwaves, Antennas, and Propagation Conference (MAPCON), 2022V.Viswa Rupa +2 more
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Finite-difference time-domain (FDTD) algorithm for multiblock grids
2014 International Conference on Electrical Machines (ICEM), 2014Veronika Kraeck, Ingo Hahn
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Finite-Difference Time-Domain (FDTD) Model for Traveling-Wave Photodetectors
Journal of Computational and Theoretical Nanoscience, 2009Soon-Cheol Kong, Young-Wan Choi
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Simulation of Finite Difference Time Domain (FDTD) with GPU and SIMD
2023 International Applied Computational Electromagnetics Society Symposium (ACES), 2023Yongjun Liu, Jing Wang
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Introduction to the finite-difference time-domain (FDTD) technique
2008 IEEE International Symposium on Electromagnetic Compatibility, 2008openaire +1 more source
A new subgridding method for the finite-difference time-domain (FDTD) algorithm
Microwave and Optical Technology Letters, 1999Wenhua Yu, Raj Mittra
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FDTD (Finite Difference Time Domain) Method
Kotaro Kajikawa, Takayuki Okamotoopenaire +1 more source