Results 31 to 40 of about 334 (69)

Machine learning-driven discovery of high-performance MEMS disk resonator gyroscope structural topologies. [PDF]

open access: yesMicrosyst Nanoeng
Chen C   +7 more
europepmc   +1 more source

Recent Design and Application Advances in Micro-Electro-Mechanical System (MEMS) Electromagnetic Actuators. [PDF]

open access: yesMicromachines (Basel)
Cheng J   +8 more
europepmc   +1 more source

Low-Damage Trimming of Micro Hemispherical Resonators by Chemical Etching. [PDF]

open access: yesMicromachines (Basel)
Zhou Z   +6 more
europepmc   +1 more source

Advances in Bio-Microelectromechanical System-Based Sensors for Next-Generation Healthcare Applications. [PDF]

open access: yesACS Omega
Priya S   +6 more
europepmc   +1 more source

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