Results 21 to 30 of about 161 (78)

Compensation of Extreme Ultraviolet Lithography Image Field Edge Effects Through Optical Proximity Correction [PDF]

open access: yes, 2014
For EUVL to be enabled for HVM, the printing of densely spaced die must be allowed. To achieve this requirement, a mitigation strategy to compensate for field edge effects is vital. This study has two goals.
Maloney, Chris
core   +1 more source

Improvements to Micro-Contact Performance and Reliability [PDF]

open access: yes, 2016
Microelectromechanical Systems (MEMS) based devices, and specifically microswitches, continue to offer many advantages over competing technologies.
Laurvick, Tod V.
core   +1 more source

Image-based EUVL Aberration Metrology [PDF]

open access: yes, 2013
A significant factor in the degradation of nanolithographic image fidelity is optical wavefront aberration. As resolution of nanolithography systems increases, effects of wavefront aberrations on aerial image become more influential.
Fenger, Germain Louis
core   +1 more source

Contact Resistance Evolution and Degradation of Highly Cycled Micro-Contacts [PDF]

open access: yes, 2014
Reliable microelectromechanical systems (MEMS) switches are critical for developing high performance radio frequency circuits like phase shifters. Engineers have attempted to improve reliability and lifecycle performance using novel contact metals ...
Stilson, Christopher L.
core   +1 more source

Towards stable nanolayers for EUV optics [PDF]

open access: yes, 2021
Nanolayers are two-dimensional architectures that, while providing an attractive platform to explore new physics, also play an essential role in technological innovations, resulting in an interest that spans from fundamental research to industrial ...
Sfiligoj, C.
core  

Aerospace medicine and biology: A continuing bibliography with indexes (supplement 324) [PDF]

open access: yes
This bibliography lists 200 reports, articles and other documents introduced into the NASA Scientific and Technical Information System during May, 1989.

core   +1 more source

Axioma d'elecció. Equivalències i aplicacions [PDF]

open access: yes, 2016
Es tracta d'estudiar l'axioma d'elecció i alguns dels molts enunciats equivalents, entendre i explicar les demostracions de les equivalències sempre que l'argument estigui a l'abast d'un estudiant acabant el grau de matemàtiques, i estudiar també els ...
Olivé Oller, Guim
core  

Versatile Synthesis of Nanofoams through Femtosecond Pulsed Laser Deposition [PDF]

open access: yes
Nanofoam materials are gaining increasing interest in the scientific community, thanks to their unique properties such as ultralow density, complex nano‐ and microstructure, and high surface area.
Maffini Alessandro   +3 more
core   +1 more source

Aula d'Ecologia : cicles de conferències 1997 i 1998 [PDF]

open access: yes, 2000
Director de l'Aula d'Ecologia: Jaume Terradas i ...
Castells, Eva   +2 more
core   +1 more source

Primary motor cortex stimulation facilitates visual guidance. [PDF]

open access: yes, 2015
The choices for analyzing cognitive load performance data are often problematic as they are task-dependent and do not generalize well. This makes research into task independent variables necessary.
Taylor, Thomas C.
core  

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