Results 21 to 30 of about 161 (78)
Compensation of Extreme Ultraviolet Lithography Image Field Edge Effects Through Optical Proximity Correction [PDF]
For EUVL to be enabled for HVM, the printing of densely spaced die must be allowed. To achieve this requirement, a mitigation strategy to compensate for field edge effects is vital. This study has two goals.
Maloney, Chris
core +1 more source
Improvements to Micro-Contact Performance and Reliability [PDF]
Microelectromechanical Systems (MEMS) based devices, and specifically microswitches, continue to offer many advantages over competing technologies.
Laurvick, Tod V.
core +1 more source
Image-based EUVL Aberration Metrology [PDF]
A significant factor in the degradation of nanolithographic image fidelity is optical wavefront aberration. As resolution of nanolithography systems increases, effects of wavefront aberrations on aerial image become more influential.
Fenger, Germain Louis
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Contact Resistance Evolution and Degradation of Highly Cycled Micro-Contacts [PDF]
Reliable microelectromechanical systems (MEMS) switches are critical for developing high performance radio frequency circuits like phase shifters. Engineers have attempted to improve reliability and lifecycle performance using novel contact metals ...
Stilson, Christopher L.
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Towards stable nanolayers for EUV optics [PDF]
Nanolayers are two-dimensional architectures that, while providing an attractive platform to explore new physics, also play an essential role in technological innovations, resulting in an interest that spans from fundamental research to industrial ...
Sfiligoj, C.
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Aerospace medicine and biology: A continuing bibliography with indexes (supplement 324) [PDF]
This bibliography lists 200 reports, articles and other documents introduced into the NASA Scientific and Technical Information System during May, 1989.
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Axioma d'elecció. Equivalències i aplicacions [PDF]
Es tracta d'estudiar l'axioma d'elecció i alguns dels molts enunciats equivalents, entendre i explicar les demostracions de les equivalències sempre que l'argument estigui a l'abast d'un estudiant acabant el grau de matemàtiques, i estudiar també els ...
Olivé Oller, Guim
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Versatile Synthesis of Nanofoams through Femtosecond Pulsed Laser Deposition [PDF]
Nanofoam materials are gaining increasing interest in the scientific community, thanks to their unique properties such as ultralow density, complex nano‐ and microstructure, and high surface area.
Maffini Alessandro +3 more
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Aula d'Ecologia : cicles de conferències 1997 i 1998 [PDF]
Director de l'Aula d'Ecologia: Jaume Terradas i ...
Castells, Eva +2 more
core +1 more source
Primary motor cortex stimulation facilitates visual guidance. [PDF]
The choices for analyzing cognitive load performance data are often problematic as they are task-dependent and do not generalize well. This makes research into task independent variables necessary.
Taylor, Thomas C.
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