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Frame structure for thin-film piezoelectric-on-silicon resonator to greatly enhance quality factor and suppress spurious modes
, 2018 Feihong Bao, Leilei Bao, Xiao-sheng Zhang, Z. Chao, Xinyi Li, F. Qin, Ting Zhang, Yi Zhang, Zhaohui Wu, J. Bao +9 moresemanticscholar +1 more source