Deterministic Detection of Single Ion Implantation
Advanced Engineering Materials, Volume 28, Issue 11, 3 June 2026.Focused ion beam implantation with high detection efficiencies will enable the rapid and scalable fabrication of advanced spin‐based technologies such as qubits. This work presents the detection efficiencies of a wide range of ions implanted into solid‐state hosts, with efficiencies of >90% recorded for ion species and substrate combinations of ...
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