Results 71 to 80 of about 158 (104)
An Improved Fabrication Process for Micro Hemispherical Resonator Gyroscope
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2019 This paper reports an improved fabrication process for micro hemispherical resonator gyroscope $(\mu \mathbf{HRG})$ , which enhance consistency of quality factor, frequency and capacitance gaps. Micro hemispherical resonator is formed from fused silica substrate through thermal deformation on fast whirling platform individually.
Yan Shi +7 more
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Vibrational Error Model Update for a Hemispherical Resonator Gyroscope
2022 29th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS), 2022D V Kondratov
exaly +2 more sources
Rate Integrating Hemispherical Resonator Gyroscope Detection Error Analysis and Compensation
IEEE Sensors Journal, 2023Weinan Xie, Yiwei Sun, Guoxing Yi
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Fuzzy Phase Trajectories in Hemispherical Resonator Gyroscopes
Herald of the Bauman Moscow State Technical University. Series Instrument Engineering, 2021The paper considers elementary fuzzy oscillator models represented by hard and fuzzy second-order differential equations with hard and fuzzy initial conditions. Linear models describe wave processes in ring resonators of hemispherical resonator gyroscopes.We show that in the case 1 (a hard model with fuzzy initial conditions), when there is no internal
N.P. Demenkov, I.A. Mochalov, D.M. Tran
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MEMS-based hemispherical resonator gyroscopes
2012 IEEE Sensors, 2012This paper introduces a fabrication technique that uses planar MEMS micromachining processes to produce hemispherical resonating shells for gyroscopes. The hemispheres exhibit a quality factor in excess of 20,000 with resonant frequencies in the range of 20 kHz for the 4-node wineglass mode.
P. Pai +3 more
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Bulletin of the Russian Academy of Sciences: Physics, 2019
The boundary problem for the eigenvalues of the electroelasticity equations describing the oscillations of a cylindrical resonator of a hemispherical resonator gyroscope is solved by finite element means. The first ten resonator frequencies are determined under different boundary conditions where PZT-4 ceramics are used as piezoelectric transducers for
I. L. Bataronov +4 more
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The boundary problem for the eigenvalues of the electroelasticity equations describing the oscillations of a cylindrical resonator of a hemispherical resonator gyroscope is solved by finite element means. The first ten resonator frequencies are determined under different boundary conditions where PZT-4 ceramics are used as piezoelectric transducers for
I. L. Bataronov +4 more
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High Precision Hemispherical Resonator Gyroscopes With Oven Control Systems
IEEE Sensors Journal, 2021This work presents a high reliable hemispherical resonator gyroscope (HRG) with a solution of an oven control system. The dynamics and thermal characteristics are firstly analyzed with a indication that the conventional look-up table (LUT) method can not fully compensate the HRG errors.
Wanliang Zhao +5 more
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Herald of the Bauman Moscow State Technical University. Series Instrument Engineering, 2020
The paper considers a hemispherical resonator gyroscope and methods for combining eight capacitive displacement sensors into a measuring instrument. We propose a circuit diagram for a measuring instrument based on operational amplifiers. The diagram makes it possible to implement oscillation measurement for direct and alternating resonator voltages as ...
G.A. Trutnev +2 more
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The paper considers a hemispherical resonator gyroscope and methods for combining eight capacitive displacement sensors into a measuring instrument. We propose a circuit diagram for a measuring instrument based on operational amplifiers. The diagram makes it possible to implement oscillation measurement for direct and alternating resonator voltages as ...
G.A. Trutnev +2 more
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Eutectic trimming of polysilicon micro hemispherical resonating Gyroscope
2013 IEEE SENSORS, 2013An algorithm based on localized stiffness modification for mode trimming of poly-silicon micro hemispherical resonating gyroscope (μHRG) is presented. This work introduces a new and systematic trimming algorithm to compensate for frequency mismatch and mode misalignment based on laser-induced silicon-metal eutectic formation.
Benoit Hamelin +2 more
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A high symmetry polysilicon micro hemispherical resonating gyroscope with spherical electrodes
2017 IEEE SENSORS, 2017This paper presents a highly symmetric micro-scale hemispherical resonator gyroscope (HRG) made of polysilicon with spherical electrodes. The spherical electrodes enhance transduction area (1.1 mm2). Meanwhile, the gyroscope has small gap size (1.8 μm) between electrodes and resonators.
Quan Wan +5 more
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