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Contacts on high aspect ratio 3D structures
Microelectronic Engineering, 2011We present a novel way for depositing material on the top surface of three-dimensional (3D) structures. This process supplies the possibility of applying a wide range of materials on the top of structures which are too high to be processed with conventional techniques. A planarization process or vertical sidewalls of the structures are not necessary.
R. Neumann +5 more
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Profile simulation of high aspect ratio contact etch
Thin Solid Films, 2007Abstract A semi-empirical profile simulator was employed to better understand fundamental mechanisms of feature evolution in a high aspect ratio contact plasma etch process. Simulation results showed that the net deposition rate of polymer on sidewall defined the necking and surface scattering of ions from the secondary facet caused the formation of ...
Doosik Kim +4 more
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Compact Design of High-Contact-Ratio Spur Gears
Volume 12: Mechanics of Solids, Structures, and Fluids, 2020Abstract This study presents a computer simulation for the dynamic design of compact high-contact-ratio spur gear transmissions. High contact ratio gears have the potential to produce lower dynamic tooth loads and minimum root stress but they can be sensitive to tooth profile errors. The analysis presented in this work was
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Study on contact distortion during high aspect ratio contact SiO2 etching
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2014As pattern density is increased in semiconductor integrated circuits (ICs) and pattern sizes are decreased to nanometer scale, high aspect ratio contact etching has become one of the most difficult processes in nanoscale IC fabrication. The increase in aspect ratio of the contact oxide etching raises problems such as low mask selectivity, microloading,
Jong Kyu Kim +3 more
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Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 2019
The mesh stiffness and contact ratio of gear drive are very important factors which have a great impact on the dynamic load. Contact ratio also affects the fluctuation and the mode of change of the mesh stiffness. In this research, a novel high contact ratio internal gear with a circular arc contact path is introduced.
Yanzhong Wang +3 more
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The mesh stiffness and contact ratio of gear drive are very important factors which have a great impact on the dynamic load. Contact ratio also affects the fluctuation and the mode of change of the mesh stiffness. In this research, a novel high contact ratio internal gear with a circular arc contact path is introduced.
Yanzhong Wang +3 more
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Dynamic Analysis of High-Contact-Ratio Spur Gears With Asymmetric Teeth
Volume 11: Mechanical Systems and Control, 2008In this research, a numerical technique is used to study the performance of high-contact-ratio (HCR) spur gears with asymmetric teeth. Asymmetric teeth have been shown to minimize dynamic loads and to increase the load carrying capacity. This is due to the fact that these teeth have a larger pressure angle on the drive side compared to the coast side ...
KARPAT, FATİH, Ekwaro Osire, Stephen
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Fabricating High Aspect Ratio Front Contacts for Solar Cells by String-printing
Optica Advanced Photonics Congress 2022, 2022We developed a scalable fabrication method for high aspect ratio solar cell front contacts. This low temperature, low silver waste process can boost solar cell performance by decreasing optical and electric losses.
Van de Voorde, Mathis Alexandre N +1 more
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Efficiency of the High Contact Ratio Involute Spur Gears With Asymmetric Teeth
Volume 13: Sound, Vibration and Design, 2010Gears with asymmetric teeth have unique potential for application in gearboxes, particularly when uni-directional loading is applied. Most recently, gears with asymmetric teeth have received much attention for use in applications that require high performance due to increased load capacity. Such applications include aircraft and wind turbine.
KARPAT, FATİH, Ekwaro-Osire, S.
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Contact stress calculation of high transverse contact ratio spur and helical gear teeth
Mechanism and Machine Theory, 2013Abstract For contact stress calculations of spur and helical gears, the Hertz equation can be used in combination with a model of load distribution along the line of contact. This load distribution is not uniform due to the changing rigidity of the pair of teeth along the path of contact and has decisive influence on the location and the value of the
Miryam B. Sánchez +2 more
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