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Cathode Sputtering in Hollow Cathode Discharges
Journal of the Physical Society of Japan, 1962In order to investigate the processes responsible for a negative resistance of the hollow cathode discharge, several discharge parameters are measured with a Langmuir probe. The vapor density distributions of the sputtered cathode metal are measured by the absorption method of the resonance radiation of the metal atom. Almost all the metal atoms in the
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1999
A new type of plasma sputtering device, named the hollow cathode magnetron (HCM), has been developed by surrounding a planar magnetron cathode with a hollow cathode structure. Operating characteristics of HCMs, current–voltage (I–V) curves for fixed discharge pressure and voltage–pressure (V–p) curves for fixed cathode current, are measured.
Zhehui Wang, Samuel A. Cohen
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A new type of plasma sputtering device, named the hollow cathode magnetron (HCM), has been developed by surrounding a planar magnetron cathode with a hollow cathode structure. Operating characteristics of HCMs, current–voltage (I–V) curves for fixed discharge pressure and voltage–pressure (V–p) curves for fixed cathode current, are measured.
Zhehui Wang, Samuel A. Cohen
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1993
Pioneering observations on the luminescent phenomena generated in evacuated tubes belong to the history of spectroscopy and date as far back as the mid-1800s.(1,2) Within this field of research, the first description of a hollow cathode discharge (HCD) published in the scientific literature can be found in the early years of this century, when a German
Sergio Caroli, Oreste Senofonte
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Pioneering observations on the luminescent phenomena generated in evacuated tubes belong to the history of spectroscopy and date as far back as the mid-1800s.(1,2) Within this field of research, the first description of a hollow cathode discharge (HCD) published in the scientific literature can be found in the early years of this century, when a German
Sergio Caroli, Oreste Senofonte
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Collisionless instability of the cathode sheath in a hollow-cathode discharge
Physical Review Letters, 1993High-intensity periodic variations of the potential fall across the cathode sheath are observed in a low-pressure magnetic-field-free hollow-cathode discharge. These potential variations cause modulation of the discharge current, reaching a depth of almost 100%.
, Arbel +4 more
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Note: Coaxial-heater hollow cathode
Review of Scientific Instruments, 2017The design and tests of a LaB6 hollow cathode with a novel heater are presented. In the new design, the heater wire is completely encapsulated around the cathode tube and a coaxial return electrode, thereby eliminating hot spots on the heater wire due to the free hanging regions. Since the new heater confines the Joule heating to the region of interest,
Huseyin, Kurt +3 more
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Hollow cathode effects in charge development processes in transient hollow cathode discharges
IEEE Transactions on Plasma Science, 1995A detailed experimental study of space charge formation and ionization growth in transient hollow cathode discharges (THCD) is presented. The experiment was performed with an applied step voltage up to 30 kV, with rise time less than 50 ns. The discharge was operated in different gases, at pressures in the range 50-750 mTorr, with cathode apertures ...
M. Favre +6 more
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Compact lanthanum hexaboride hollow cathode
Review of Scientific Instruments, 2010A compact lanthanum hexaboride hollow cathode has been developed for space applications where size and mass are important and research and industrial applications where access for implementation might be limited. The cathode design features a refractory metal cathode tube that is easily manufactured, mechanically captured orifice and end plates to ...
Dan M, Goebel, Ronald M, Watkins
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Observations of hollow cathode light emission from a transient hollow cathode discharge
Applied Physics Letters, 1991Experimental observations are presented on the light emission from the hollow cathode region of a pulsed hollow cathode discharge. A 2 mJ, 30 ns, 1.06 μm laser pulse incident on the back of the cathode is used to trigger the discharge. The temporal evolution of the light emission from this region is recorded in 50 nm spectral bands.
WYNDHAM, E +3 more
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Transactions of the IRE Professional Group on Electron Devices, 1953
The properties of a cathode consisting of an internally coated hollow shell with an aperture have been measured for a variety of geometries. Electrons are emitted from the edge of the aperture at current densities as high as 30 amp/sq cm. The cathode is particularly adapted to producing hollow or odd-shaped electron beams.
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The properties of a cathode consisting of an internally coated hollow shell with an aperture have been measured for a variety of geometries. Electrons are emitted from the edge of the aperture at current densities as high as 30 amp/sq cm. The cathode is particularly adapted to producing hollow or odd-shaped electron beams.
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1974
Publisher Summary This chapter provides an overview of hollow cathode arcs (HCA). Hollow cathodes have been used for some years in different discharge devices, working under varying conditions in widely extended ranges. All of these devices have one common feature: the cathode presents a hollow cavity, enclosed or at least partially bound by walls ...
Jean-Loup Delcroix +1 more
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Publisher Summary This chapter provides an overview of hollow cathode arcs (HCA). Hollow cathodes have been used for some years in different discharge devices, working under varying conditions in widely extended ranges. All of these devices have one common feature: the cathode presents a hollow cavity, enclosed or at least partially bound by walls ...
Jean-Loup Delcroix +1 more
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