Results 91 to 94 of about 107 (94)
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Effect of slurry and fixed abrasive pad on chemical mechanical polishing of SiC wafer

Materials Science in Semiconductor Processing
Daqing Zhou
exaly  

Effect of triethanolamine concentration on self-sharpening performance of fixed abrasive pad

Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014
exaly  

Self-Conditioning Fixed Abrasive Pad in CMP

Journal of the Electrochemical Society, 2004
exaly  

Influence of pore distribution of fixed abrasive pad on its machining performance

Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014
exaly  

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